
TEL IndyPlus, 300 mm, 2012
TEL IndyPlus 300 mm system, built in 2012 and located in Malta, USA. Configured for IRAD Nitride process in the diffusion section with a main FVX system, carrier transfer robot, KHI WTR, and FOUP factory interface.Specifications Manufacturer: TEL Model: TEL IndyPlus Vintage: 2012 Wafer Size: 300 mm Serial Number: S00001255346 Location: Malta, USA Tool ID: FVX24215 Software Version: V8.10 Rev.000 [i01300-00000] CIM: SECS/GEM Process: IRAD Nitride Fab Section: Diffusion Configuration Main FVX System Carrier Transfer Robot KHI WTR FOUP Factory Interface










