Standalone Sputterers for Scientific Applications

Novellus INOVA 200 mm system, built in 2022 and located in Singapore. Configured for CUSEED process with a mainframe, two SMIF factory interfaces, and two robot handlers.Specifications Manufacturer: Novellus Model: INOVA Vintage: 2022 Wafer Size: 200 mm Location: Singapore Tool ID: FCUD-X01 Tool Status: Disconnected Fab Section: Thin Film CIM: GEM Process: CUSEED Configuration Mainframe 2 × SMIF Factory Interface 2 × Robot Handler

Make: NOVELLUS

Model: INOVA

1 unit @ Best Price

Novellus LAM INOVA 200 mm system, built in 2000 and located in Woodlands, Singapore. Configured for HCM CU process in the Thin Film section with a MAG7 robot handler and two SMIF factory interfaces.Specifications Manufacturer: Novellus Model: LAM INOVA Vintage: 2000 Wafer Size: 200 mm Location: Woodlands, Singapore Tool ID: FCUD-X03 Tool Status: Connected Fab Section: Thin Film Process: HCM CU Configuration Main Frame DAMA Clean MAG7 Robot Handler 2 × SMIF Factory Interface

Make: NOVELLUS

Model: LAM INOVA

1 unit @ Best Price

Novellus LAM INOVA 200 mm system, built in 1986 and located in Singapore. Configured for HCM CU process in the Thin Film section with a FOUP factory interface. Includes a robot handler.Specifications Manufacturer: Novellus Model: LAM INOVA Vintage: 1986 Wafer Size: 200 mm Location: Singapore Tool ID: FCUD-X04 Tool Status: Running Wafers Fab Section: Thin Film Process: HCM CU Configuration Robot Handler 2 × FOUP Factory Interface

Make: NOVELLUS

Model: LAM INOVA

1 unit @ Best Price