Mixed Lots Of Plasma Processing Equipment

Applied Materials Precision 5000 200 mm system, built in 1993 and located in Burlington, USA. Configured for Spacer 2 ILD deposition and etch with a mainframe, oxide etch chambers, and a robot handler. The system includes an open cassette factory interface.Specifications Manufacturer: Applied Materials Model: Precision 5000 Vintage: 1993 Wafer Size: 200 mm Serial Number: CA5991 Location: Burlington, USA Tool ID: 93A85X Tool Status: Running Wafers Fab Section: Thin Film Software Version: E5.01E Process: Spacer 2 ILD Dep and Etch Configuration Mainframe Oxide Etch Chambers Robot Handler Open Cassette Factory Interface Nitride Etch Chamber

Make: Applied Materials

Model: Precision 5000

1 unit @ Best Price

LAM Lam9400SE 200 mm system, built in 1998 and located in Burlington, USA. Configured for poly etch with a stand-alone main system, harmonic handler, and open cassette factory interface.Specifications Manufacturer: LAM Model: Lam9400SE Vintage: 1998 Wafer Size: 200 mm Serial Number: 40104 Location: Burlington, USA Tool ID: 93A93X Tool Status: Connected Fab Section: Etch Software Version: Classic CIM: SECS, GEM Process: Poly etch Configuration Open Cassette Factory Interface 2 × Harmonic Handler Stand Alone Main System Not Included Turbo Controller 2 × Generator Vat Motor

Make: LAM

Model: Lam9400SE

1 unit @ Best Price

LAM Lam 9608 200 mm system, built in 1999 and located in Burlington, USA. Configured for metal etch with a stand-alone main system, two harmonic handlers, and two open cassette factory interfaces.Specifications Manufacturer: LAM Model: Lam 9608 Vintage: 1999 Wafer Size: 200 mm Serial Number: 4268 Location: Burlington, USA Tool ID: 67298V Tool Status: Connected Fab Section: Etch Software Version: E2.0.1-088b CIM: SECS, GEM Process: Metal Etch Configuration Stand Alone Main System 2 × Harmonic Handler 2 × Open Cassette Factory Interface Not Included Mid Chamber Process Turbo Vat Slide 3 × Generators

Make: LAM

Model: Lam 9608

1 unit @ Best Price

AMAT Centura ACP 300 mm system, built in 2009 and located in Malta, USA. Configured for SiCoNi processing with two SiCoNi chambers, a Brooks Back End Robot handler, and a FOUP factory interface. The system is part of the diffusion section.Specifications Manufacturer: AMAT Model: AMAT Centura ACP Vintage: 2009 Wafer Size: 300 mm Serial Number: 0521302 Location: Malta, USA Tool ID: EPI21602 Tool Status: Disconnected Fab Section: Diffusion CIM: SECS/GEM Process: SiCoNi Configuration Centura Mainframe 2 × SiCoNi Chamber Brooks Back End Robot 5.X Yaskawa FI Robot 2 × Batch Loadlocks 2 × FOUP Factory Interface Included Auxiliary Equipment FI Robot Controller 2 × Siconi Lid TC Buffer Throttle Valve Slit Actuator Blank-off Plate 2 × Cooldown Station Assy Loadlock Cover 2 × Buffer CDN Cards Siconi Isolator FI Aligner Siconi RF Ballast Siconi Controller Tower Buffer Power Supply 2 × Siconi Lid Heater Driver Siconi Electrode 2 × Siconi Pneumatic Block Siconi Crossover Gas Line Siconi Chamber Blank-off Plate Not Included Pumps Chillers Abatement

Make: Applied Materials

Model: AMAT Centura ACP

1 unit @ Best Price

TEL TACTRAS with VIGUS Ix BSP Chambers, 300 mm system, built in 2014 and located in Malta, USA. Configured for MHM Trench process with six VIGUS Ix BSP chambers, a YASKAWA loader module, and three FOUP factory interfaces. This reactive ion etcher is equipped with a nitrogen purge storage and controller.Specifications Manufacturer: TEL Model: TEL TACTRAS with VIGUS Ix BSP Chambers Vintage: 2014 Wafer Size: 300 mm Serial Number: FA1200 Location: Malta, USA Tool ID: ETX28511 Description: Reactive Ion Etcher Tool Status: Connected Fab Section: Etch Software Version: Ver. 6.80 CIM: GEM Process: MHM Trench Configuration 6 × VIGUS Ix BSP Chamber YASKAWA Loader Module 3 × FOUP Factory Interface Nitrogen Purge Storage and Controller Not Included TM Robot Controller PM1 TMP Controller PM1 Lifter Pin Driver

Make: Tel

Model: TEL TACTRAS with VIGUS Ix BSP Chambers

1 unit @ Best Price

TEL Loader Module 300 mm system, built in 2014 and located in Malta, USA. Configured for Vigus BEOL process with six chambers. Suitable for etch applications.Specifications Manufacturer: TEL Model: Loader Module Vintage: 2014 Wafer Size: 300 mm Serial Number: FA1192 Location: Malta, USA Tool ID: ETX28505 Software Version: Ver6.80Rev502 Process: Vigus BEOL Fab Section: Etch Configuration 6 × Chambers Not Included 6 × HV Power Supply 6 × ESC

Make: Tel

Model: Loader Module

1 unit @ Best Price

LAM Lam 2300 E5 - MWS 1-Chamber KiyoEX 3-Chambers, 300 mm system, built in 2011 and located in Malta, USA. Configured for etch with four chambers. The process is 14LPP FN/RC-SC/RX-DT.Specifications Manufacturer: LAM Model: Lam 2300 E5 - MWS 1-Chamber KiyoEX 3-Chambers Vintage: 2011 Wafer Size: 300 mm Serial Number: 1017439-11-28-0306 Location: Malta, USA Tool ID: ETX2101 Tool Status: Connected Fab Section: Etch Software Version: SP11-HF8-Release Version 1.8.4 Process: 14LPP FN/RC-SC/RX-DT Configuration 4 × Main System

Make: LAM

Model: Lam 2300 E5 - MWS 1-Chamber KiyoEX 3-Chambers

1 unit @ Best Price

LAM Lam 2300 E5 - MWS 1-Chamber KiyoEX 4-Chambers, 300 mm system, built in 2014 and located in Malta, USA. Configured for etch with five chambers. The process includes 14LPP FN/RC-SC/FP/RX-DT.Specifications Manufacturer: LAM Model: Lam 2300 E5 - MWS 1-Chamber KiyoEX 4-Chambers Vintage: 2014 Wafer Size: 300 mm Serial Number: 1017439-14-23-1244 Location: Malta, USA Tool ID: ETX21105 Tool Status: Connected Fab Section: Etch Software Version: SP11-HF8-Release Version 1.8.4 Process: 14LPP FN/RC-SC/FP/RX-DT Configuration 5 × Chambers

Make: LAM

Model: Lam 2300 E5 - MWS 1-Chamber KiyoEX 4-Chambers

1 unit @ Best Price

Applied Materials Centura Etch 200 mm system, built in 1999 and located in Woodlands, Singapore. Configured for oxide etching with one HP+ robot handler. The system is designed for etch applications.Specifications Manufacturer: Applied Materials Model: CENTURA ETCH Vintage: 1999 Wafer Size: 200 mm Serial Number: EE38 Location: Woodlands, Singapore Tool ID: STRN-11 Tool Status: Running Wafers Fab Section: Etch Software Version: B5.1_16 CIM: SECS Process: OXIDE ETCHER Configuration Main System HP+ Robot Handler Not Included 2 × LPT 3 × Chiller

Make: Applied Materials

Model: CENTURA ETCH

1 unit @ Best Price

AMAT CENTURA POLY 200 mm system, built in 2001 and located in Woodlands, Singapore. Configured for metal etching with a VHP Robot Handler. The system is part of the Etch fab section.Specifications Manufacturer: AMAT Model: CENTURA POLY Vintage: 2001 Wafer Size: 200 mm Serial Number: 566512990-2 Location: Woodlands, Singapore Tool ID: DPLY-502 Tool Status: Running Wafers Fab Section: Etch Software Version: E4.7_25 Process: METAL ETCHER Configuration VHP Robot Handler Not Included 2 × LPT Dry Pump

Make: Applied Materials

Model: CENTURA POLY

1 unit @ Best Price

LAM Research Metal M, Strip45 300 mm system, built in 2012 and located in Malta, USA. Configured for HMO RIE etch processes with a 2300E5 main system, two robot handlers, and a FOUP factory interface.Specifications Manufacturer: LAM Research Model: Metal M, Strip45 Vintage: 2012 Wafer Size: 300 mm Serial Number: 1017439-12-25-0606 Location: Malta, USA Tool ID: ETX2922 Tool Status: Connected Fab Section: Etch Software Version: 1.8.4-SP19HF5 CIM: GEM Process: HMO RIE Configuration 2300E5 Main System 2 × Robot Handler 3 × FOUP Factory Interface Not Included Manometer 10 × Some Missing Parts on PM5 TCW Heater on PM2

Make: Lam Research

Model: Metal M, Strip45

1 unit @ Best Price

LAM Lam 9608 200 mm system, built in 1999 and located in Burlington, USA. Configured for metal etch with an open cassette factory interface. The tool is designed for metal etching applications.Specifications Manufacturer: LAM Model: Lam 9608 Vintage: 1999 Wafer Size: 200 mm Serial Number: 4650 Location: Burlington, USA Tool ID: 93693X Software Version: E2.0.1-088b CIM: SECS, GEM Process: Metal Etch Fab Section: Etch Configuration Main System 2 × Open Cassette Factory Interface Not Included Mid Chamber Turbo Controller 3 × Generator

Make: LAM

Model: Lam 9608

1 unit @ Best Price