LAM Lam 9608 200 mm system, built in 1999 and located in Burlington, USA. Configured for metal etch with an open cassette factory interface. The tool is designed for metal etching applications.Specifications

• Manufacturer: LAM
• Model: Lam 9608
• Vintage: 1999
• Wafer Size: 200 mm
• Serial Number: 4650
• Location: Burlington, USA
• Tool ID: 93693X
• Software Version: E2.0.1-088b
• CIM: SECS, GEM
• Process: Metal Etch
• Fab Section: EtchConfiguration
  • Main System
  • 2 × Open Cassette Factory InterfaceNot Included
    • Mid Chamber
    • Turbo Controller
    • 3 × Generator