Other Chemical Vapor Deposition Equipment
Novellus SCON, 200mm, s/n: 97-47-5431
Tungsten CVD
Tool ID: WCVD-A03
Chemical Vapor Deposition Equipment
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Other Chemical Vapor Deposition Equipment
Novellus C2-SCON, 200mm, s/n: 00-11-C25866
Novellus Concept 2 Sequel
Tool ID: CAPO-A05
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HITACHI KOKUSAI Quixace - DJ-1236VN-DF, 300mm, s/n: DN23300
MT-TiN
Tool ID: FVX2488
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Other Chemical Vapor Deposition Equipment
TEL Tactras Vigus, 300mm, s/n: FA1272
With Vigus Ix BSP Chambers
Tool ID: ETX28512
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Hitachi Kokusai Quixace, 300mm, s/n: T2DC6-16386
Lowk Deposition Furnace
Tool ID: FVX23902
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Other Chemical Vapor Deposition Equipment
TEL Tactras Vigus, 300mm, s/n: FA1192
TEL Tactras Vigus ATCC ILDEtch BEOL
Tool ID: ETX28505
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SVG VTR7000, 200mm, s/n: V7B-429
Vertical batch furnace that can be optimized to run various diffusion, oxidation and pressure vapor deposition processes
Tool ID: 93942X
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HITACHI KOKUSAI Quixace - DJ-1236VN-DF, 300mm, s/n: T2DC6-16595-1
TiN ALD
Tool ID: FVX2487
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Other Chemical Vapor Deposition Equipment
TEL Tactras Vigus, s/n: FA2141
TEL Tactras Vigus LK3
Tool ID: ETX4520
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Atmospheric Pressure CVD Tools
AMAT PRODUCER SE, s/n: 413311
BPSG Process
Tool ID: FSAC731 (TC-TSA-07)
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