
TEL IndyPlus, 300 mm, 2016
TEL IndyPlus 300 mm system, built in 2016 and located in Malta, USA. Configured for IRAD Nitride process in the Diffusion section with a main FVX system, a carrier transfer robot, and a FOUP factory interface.Specifications Manufacturer: TEL Model: TEL IndyPlus Vintage: 2016 Wafer Size: 300 mm Serial Number: S000014Y5411 Location: Malta, USA Tool ID: FVX24210 Tool Status: Running Wafers Fab Section: Diffusion Software Version: V8.01 Rev.000[i00E00-00001] CIM: SECS/GEM Process: IRAD Nitride Configuration Main FVX System Carrier Transfer Robot FOUP Factory Interface KHI WHR Handler




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