TEL IndyPlus, 300 mm, 2012
TEL IndyPlus 300 mm system, built in 2012 and located in Malta, USA. Configured for IRAD Nitride process in the diffusion section with a main FVX system, carrier transfer robot, KHI WTR, and FOUP factory interface.Specifications
- Manufacturer: TEL
- Model: TEL IndyPlus
- Vintage: 2012
- Wafer Size: 300 mm
- Serial Number: S00001255346
- Location: Malta, USA
- Tool ID: FVX24215
- Software Version: V8.10 Rev.000 [i01300-00000]
- CIM: SECS/GEM
- Process: IRAD Nitride
- Fab Section: DiffusionConfiguration
- Main FVX System
- Carrier Transfer Robot
- KHI WTR
- FOUP Factory Interface
1 unit @ Best Price
MAKE: Tel
MODEL: TEL IndyPlus
CATEGORY: Vertical LPCVD Furnaces
Malta, USA
SPECS
| Manufacturer | Tel |
| Model | TEL IndyPlus |
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