Other Materials Handling Equipment for Wafer Fabrication

KLA TENCOR WMS 200 mm system, built in 2000 and located in Singapore. Configured for wafer sorting in the metrology section with a main unit, a robot handler, and two SMIF factory interfaces.Specifications Manufacturer: KLA Tencor Model: WMS Vintage: 2000 Wafer Size: 200 mm Serial Number: PPV0023(SMP-IMPLANT) Location: Singapore Tool ID: WMST-5I2 Tool Status: Connected Fab Section: Metrology Process: Wafer Sorter Configuration Main Unit Robot Unit 2 × SMIF Factory Interface

Make: KLA Tencor

Model: WMS

1 unit @ Best Price

Tool ID: MSOR606

Make: AXISTEC

Model: SMIF WAFER SORTER 2 WITH OCR

1 unit @ Best Price

Tool ID: MSOR604

Make: GILEO Automation

Model: SPPESORT200-INV

1 unit @ Best Price

Tool ID: DWFMP01

Make: Dyna Tech

Model: DT-SWM1040A

1 unit @ Best Price

N2 Purge system Tool ID: EN2P302

Make: SKYTECH

Model: N2 purge

1 unit @ Best Price

N2 Purge system Tool ID: EN2P301

Make: SKYTECH

Model: N2 purge

1 unit @ Best Price