
Sankyo SWH80, 200 mm, 1998
SANKYO SWH80 200 mm system, built in 1998 and located in Singapore. Configured for cleaning wafer applications with a SMIF factory interface.Specifications Manufacturer: Sankyo Model: SWH80 Vintage: 1998 Wafer Size: 200 mm Serial Number: DOO560910 Location: Singapore Tool ID: ORGAT-02 Tool Status: Running Wafers Fab Section: Clean CIM: SECS,GEM Configuration SMIF Factory Interface









