Lithography Equipment

TEL/FSI FSI POLARIS 2000 200 mm system, built in 1995 and located in Burlington, USA. Configured for apply/develop processes in lithography with an RX-90 handler and six open cassette factory interfaces.Specifications Manufacturer: TEL/FSI Model: FSI POLARIS 2000 Vintage: 1995 Wafer Size: 200 mm Serial Number: 907692-001 Location: Burlington, USA Tool ID: 67307W Tool Status: Connected Fab Section: Lithography Software Version: UNIX Process: APPLY/DEVELOP Configuration RX-90 Handler 6 × Open Cassette Factory Interface Main Tool

Make: TEL/FSI

Model: FSI POLARIS 2000

1 unit @ Best Price

TEL Lithius 300 mm system, built in 2005 and located in Singapore. Configured for 193NM ARF lithography with a main tool, TCU, TCT, and a FOUP factory interface. The system includes IRAS and IRAM handlers.Specifications Manufacturer: TEL Model: Lithius Vintage: 2005 Wafer Size: 300 mm Serial Number: G250319 Location: Singapore Tool ID: LATK702 Tool Status: Warehouse Fab Section: Lithography Software Version: 3.00.71 CIM: SECS Process: 193NM ARF Configuration TCU Main Tool TCT 4 × FOUP Factory Interface 2 × BCT 2 × COT 5 × DEV Included Auxiliary Equipment IRAS IRAM CRA 2 × PRA

Make: Tel

Model: Lithius

1 unit @ Best Price

TEL CLEANTRACK ACT8 200 mm system, built in 1999 and located in Burlington, USA. Configured for photolithography apply/develop with two three-axis robots, two four-axis robots, and an open cassette factory interface.Specifications Manufacturer: TEL Model: TEL CLEANTRACK ACT8 Vintage: 1999 Wafer Size: 200 mm Serial Number: 9290693 Location: Burlington, USA Tool ID: 93E69X Tool Status: Connected Fab Section: Lithography Software Version: 204000r130r131 Process: Photolithography Apply/ Develop Configuration Main Tool Body 2 × Three-Axis Robots 2 × Four-Axis Robots 2 × Chemical Cabinets 4 × Open Cassette Factory Interface Included Auxiliary Equipment 3-2 Spin Motor Driver 3-4 Spin Motor Driver Block 2 PRA Power Slice ACT8 Main Controller 3-3 Spin Motor Driver Not Included Pumps Chillers Abatement

Make: Tel

Model: TEL CLEANTRACK ACT8

1 unit @ Best Price

Tokyo Electron Limited ACT8 200 mm system, built in 1999 and located in Woodlands, Singapore. Configured for coat/develop processes with a main body, robot handler, and SMIF factory interface. Suitable for lithography applications.Specifications Manufacturer: Tokyo Electron Limited Model: ACT8 Vintage: 1999 Wafer Size: 200 mm Serial Number: 9190688 Location: Woodlands, Singapore Tool ID: CTDV-507 Software Version: 1.18.002 CIM: SECS Process: COAT / DEV Fab Section: Lithography Configuration Main Body Robot Handler CRA 4 × SMIF Factory Interface IRA Not Included T&H

Make: Tokyo Electron Limit

Model: ACT8

1 unit @ Best Price

TEL CLEANTRACK ACT8 200 mm system, built in 1999 and located in Burlington, USA. Configured for photolithography apply/develop with a main tool body, cassette robot arm, interface robot arm, and open cassette factory interface.Specifications Manufacturer: TEL Model: TEL CLEANTRACK ACT8 Vintage: 1999 Wafer Size: 200 mm Serial Number: 9290573 Location: Burlington, USA Tool ID: 93B70X Tool Status: Connected Fab Section: Lithography Software Version: 204000r130r131 Process: Photolithography Apply/Develop Configuration Main Tool Body Cassette Robot Arm Interface Robot Arm 2 × Process Robot Arm 4 × Open Cassette Factory Interface Included Auxiliary Equipment 2 × Chem Cabinets Not Included IRA Z Driver ACT8 Main Computer Floppy Drive IRA Z Motor Developer Spin Driver

Make: Tel

Model: TEL CLEANTRACK ACT8

1 unit @ Best Price