Other Plasma Processing Equipment and Tools
OXFORD INSTRUMENTS, OPAL, s/n: 94-220255
RF/Plasma oxide deposition tool
Tool ID: SPL2178
Wafer Fabrication Equipment
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Other Plasma Processing Equipment and Tools
AXCELIS INT340, 300mm, s/n: INT340029
NH3 Plasmastrip
Tool ID: PSX4603
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Other Plasma Processing Equipment and Tools
Mattson Aspen II, 200mm, s/n: 746
ICP Asher
Tool ID: EMAT303
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Other Plasma Processing Equipment and Tools
Mattson Aspen II, 200mm, s/n: 921
ICP AsherTool ID: EMAT202
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TEL FSI Zeta, 200mm, s/n: 0131-0020-0203
Batch Process
Tool ID: MIXF-203
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TEL / FSI Zeta, 200mm, s/n: 0131-0018-0802
Chemical Resist Stripper
Tool ID: CRSW-A08
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Other Plasma Processing Equipment and Tools
AMAT CENTURA ENABLER, 300mm, s/n: 407472
Dry Etch, Bx-, Cx-, E1 layers, 300mm wafers, 32nm BD/SICOH Etch
Tool ID: ETX650
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