Wafer Fabrication Equipment

Nikon Precision Inc. NSR 4425i 200 mm system, built in 1997 and located in Burlington, USA. Configured for photolithography with a main body and an open cassette factory interface.Specifications Manufacturer: Nikon Precision Inc. Model: NSR 4425i Vintage: 1997 Wafer Size: 200 mm Serial Number: 1107028 Location: Burlington, USA Tool ID: 67335V Tool Status: Connected Fab Section: Lithography Software Version: MCSV Ver. 241 OCSV Ver. 241 CIM: SECS Process: Photolithography Configuration Main Body Open Cassette Factory Interface WL Type 2 Handler System

Make: Nikon Precision Inc.

Model: NSR 4425i

1 unit @ Best Price

TEL INDY PLUS 300 mm system, built in 2021 and located in Malta, USA. Configured for low temperature copper anneal with a KHI 3 Axis, five fork variable pitch handler and two FOUP factory interfaces.Specifications Manufacturer: TEL Model: TEL INDY PLUS Vintage: 2021 Wafer Size: 300 mm Serial Number: S00002120121 Location: Malta, USA Tool ID: FVX26012 Tool Status: Disconnected Fab Section: Implant Software Version: WAVES 8.1 CIM: SECS/GEM Process: Cu-Anneal Configuration 2 × FOUP Factory Interface KHI 3 Axis, Five Fork Variable Pitch Handler Low Temperature Copper Anneal Furnace

Make: Tel

Model: TEL INDY PLUS

1 unit @ Best Price

TEL INDY PLUS-I-M 300 mm system, built in 2012 and located in Malta, USA. Configured for Irad Nitride processing with a FOUP factory interface. This tool is part of the diffusion section.Specifications Manufacturer: TEL Model: TEL INDY PLUS-I-M Vintage: 2012 Wafer Size: 300 mm Serial Number: S00001265346 Location: Malta, USA Tool ID: FVX2425 Software Version: TEL Waves Process: Irad Nitride Fab Section: Diffusion Configuration Main System FOUP Factory Interface

Make: Tel

Model: TEL INDY PLUS-I-M

1 unit @ Best Price

TEL TELINDY 300 mm system, built in 2016 and located in Malta, USA. Configured for LT APOLY process in the diffusion section with a wafer transfer robot and a FOUP factory interface.Specifications Manufacturer: TEL Model: TELINDY Vintage: 2016 Wafer Size: 300 mm Serial Number: S00001395165 Location: Malta, USA Tool ID: FVX25300 Software Version: V8.17 Rev.000 [i01500-00000] CIM: SECS, GEM Process: LT APOLY Fab Section: Diffusion Configuration FOUP Factory Interface Wafer Transfer Robot

Make: Tel

Model: TELINDY

1 unit @ Best Price

Applied Materials Producer GT 300 mm system, built in 2014 and located in Malta, USA. Configured for ATRP process with three chambers, an EFEM with loadlock and buffer, and a FOUP factory interface. Includes Brooks Mag8 FX and Kawasaki ATM robots.Specifications Manufacturer: Applied Materials Model: Producer GT Vintage: 2014 Wafer Size: 300 mm Serial Number: 428276 Location: Malta, USA Tool ID: CVD2854 Fab Section: Thin Film Software Version: pmB4.3_61 CIM: SECS, GEM Process: ATRP Process Configuration EFEM with Loadlock and Buffer Brooks Mag8 FX Robot 3 × FOUP Factory Interface 2 × Kawasaki ATM Robot Not Included Gold Box Chamber Lid Cover Foreline Heater Jacket MF EV Manifold Dry Pump UPS Unit RF Strap

Make: Applied Materials

Model: Producer GT

1 unit @ Best Price

Applied Materials Precision 5000 200 mm system, built in 1993 and located in Burlington, USA. Configured for Spacer 2 ILD deposition and etch with a mainframe, oxide etch chambers, and a robot handler. The system includes an open cassette factory interface.Specifications Manufacturer: Applied Materials Model: Precision 5000 Vintage: 1993 Wafer Size: 200 mm Serial Number: CA5991 Location: Burlington, USA Tool ID: 93A85X Tool Status: Running Wafers Fab Section: Thin Film Software Version: E5.01E Process: Spacer 2 ILD Dep and Etch Configuration Mainframe Oxide Etch Chambers Robot Handler Open Cassette Factory Interface Nitride Etch Chamber

Make: Applied Materials

Model: Precision 5000

1 unit @ Best Price

LAM Lam9400SE 200 mm system, built in 1998 and located in Burlington, USA. Configured for poly etch with a stand-alone main system, harmonic handler, and open cassette factory interface.Specifications Manufacturer: LAM Model: Lam9400SE Vintage: 1998 Wafer Size: 200 mm Serial Number: 40104 Location: Burlington, USA Tool ID: 93A93X Tool Status: Connected Fab Section: Etch Software Version: Classic CIM: SECS, GEM Process: Poly etch Configuration Open Cassette Factory Interface 2 × Harmonic Handler Stand Alone Main System Not Included Turbo Controller 2 × Generator Vat Motor

Make: LAM

Model: Lam9400SE

1 unit @ Best Price

AME Precision 5000 200 mm system, built in 1995 and located in Burlington, USA. Configured for ILD processes with a mainframe, a robot handler, and an open cassette factory interface.Specifications Manufacturer: AME Model: Precision 5000 Vintage: 1995 Wafer Size: 200 mm Serial Number: 4373 Location: Burlington, USA Tool ID: 67272V Tool Status: Connected Fab Section: Thin Film Software Version: E5.01E Process: ILD Configuration Mainframe Robot Handler Open Cassette Factory Interface

Make: AME

Model: Precision 5000

1 unit @ Best Price

LAM Lam 9608 200 mm system, built in 1999 and located in Burlington, USA. Configured for metal etch with a stand-alone main system, two harmonic handlers, and two open cassette factory interfaces.Specifications Manufacturer: LAM Model: Lam 9608 Vintage: 1999 Wafer Size: 200 mm Serial Number: 4268 Location: Burlington, USA Tool ID: 67298V Tool Status: Connected Fab Section: Etch Software Version: E2.0.1-088b CIM: SECS, GEM Process: Metal Etch Configuration Stand Alone Main System 2 × Harmonic Handler 2 × Open Cassette Factory Interface Not Included Mid Chamber Process Turbo Vat Slide 3 × Generators

Make: LAM

Model: Lam 9608

1 unit @ Best Price

AMAT Centura ACP 300 mm system, built in 2009 and located in Malta, USA. Configured for SiCoNi processing with two SiCoNi chambers, a Brooks Back End Robot handler, and a FOUP factory interface. The system is part of the diffusion section.Specifications Manufacturer: AMAT Model: AMAT Centura ACP Vintage: 2009 Wafer Size: 300 mm Serial Number: 0521302 Location: Malta, USA Tool ID: EPI21602 Tool Status: Disconnected Fab Section: Diffusion CIM: SECS/GEM Process: SiCoNi Configuration Centura Mainframe 2 × SiCoNi Chamber Brooks Back End Robot 5.X Yaskawa FI Robot 2 × Batch Loadlocks 2 × FOUP Factory Interface Included Auxiliary Equipment FI Robot Controller 2 × Siconi Lid TC Buffer Throttle Valve Slit Actuator Blank-off Plate 2 × Cooldown Station Assy Loadlock Cover 2 × Buffer CDN Cards Siconi Isolator FI Aligner Siconi RF Ballast Siconi Controller Tower Buffer Power Supply 2 × Siconi Lid Heater Driver Siconi Electrode 2 × Siconi Pneumatic Block Siconi Crossover Gas Line Siconi Chamber Blank-off Plate Not Included Pumps Chillers Abatement

Make: Applied Materials

Model: AMAT Centura ACP

1 unit @ Best Price

Santa Clara Plastic (SCP) 9415 200 mm system, built in 2002 and located in Woodlands, Singapore. Configured for nitride etch with a wet bench, a robot handler, and two SMIF factory interfaces.Specifications Manufacturer: Santa Clara Plastic (SCP)/none Model: 9415 Vintage: 2002 Wafer Size: 200 mm Serial Number: 00036340-01 Location: Woodlands, Singapore Tool ID: NITW-202 Tool Status: Running Wafers Fab Section: Clean Software Version: Windows 2000 CIM: SEC, GEM Linked Process: Nitride etch Configuration Wet Bench ROBOT Handler 2 × SMIF Factory Interface Included Auxiliary Equipment Dryer HX 150 Chiller UPS Not Included 2 × CO2 Cylinder

Make: Santa Clara Plastic (SCP)/none

Model: 9415

1 unit @ Best Price

Wonik IPS MAHA MP 300 mm system, built in 2019 and located in Malta, USA. Configured for SiON deposition with three chambers, an Ulvac covot-6 VAC robot handler, and a FOUP factory interface. Suitable for thin film applications.Specifications Manufacturer: Wonik IPS Model: MAHA MP Vintage: 2019 Wafer Size: 300 mm Serial Number: SE14PE311 Location: Malta, USA Tool ID: CVD24603 Tool Status: Connected Fab Section: Thin Film Software Version: GF.2.4.2_100 CIM: SECS Process: SiON Configuration EFEM with Loadlocks and Buffer Ulvac Covot-6 VAC Robot Handler 3 × FOUP Factory Interface Not Included 2 × Eurotherm Temp TM Robot Blade 3 × Chuck Heater

Make: Wonik IPS

Model: MAHA MP

1 unit @ Best Price