Other Plasma Processing Equipment and Tools
OXFORD INSTRUMENTS, OPAL, s/n: 94-220255
RF/Plasma oxide deposition tool
Tool ID: SPL2178
Wafer Fabrication Equipment
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Other Plasma Processing Equipment and Tools
AMAT Producer GT, 300mm, s/n: 430632-ZG-ACHA
FRONTIER - Etch for Junctions
CHA-SiCoNi, CHB-Frontier, CHCFrontier
Tool ID: CVD21200
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Other Plasma Processing Equipment and Tools
AXCELIS INT340, 300mm, s/n: INT340029
NH3 Plasmastrip
Tool ID: PSX4603
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Other Plasma Processing Equipment and Tools
TEL Alpha-8S, 200mm, s/n: A00009835234
Well Drive Furnace
Tool ID: WDRIV-09
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Other Plasma Processing Equipment and Tools
LAM 2300 E4, 300mm, s/n: 1017439-11-32-0313
MWS 1CH KiyoFX 3CH
Tool ID: ETX2400
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Other Plasma Processing Equipment and Tools
AMAT 5200 Centura 1, 200mm, s/n: 93A88X
MC IPS
Tool ID: 93A88X
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Other Plasma Processing Equipment and Tools
AMAT CENTURA ENABLER, 300mm, s/n: 407472
Dry Etch, Bx-, Cx-, E1 layers, 300mm wafers, 32nm BD/SICOH Etch
Tool ID: ETX650
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HITACHI KOKUSAI Quixace - DJ-1236VN-DF, 300mm, s/n: DN23300
MT-TiN
Tool ID: FVX2488
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