Other Plasma Processing Equipment and Tools
OXFORD INSTRUMENTS, OPAL, s/n: 94-220255
RF/Plasma oxide deposition tool
Tool ID: SPL2178
Wafer Fabrication Equipment
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Other Wafer Production Equipment
Rorze A4-BL-R, 300mm, s/n: TS05X117-02
Wafer sorter
Tool ID: AM-WSS-28
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Other Plasma Processing Equipment and Tools
AMAT Producer GT, 300mm, s/n: 430632-ZG-ACHA
FRONTIER - Etch for Junctions
CHA-SiCoNi, CHB-Frontier, CHCFrontier
Tool ID: CVD21200
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Other Plasma Processing Equipment and Tools
AXCELIS INT340, 300mm, s/n: INT340029
NH3 Plasmastrip
Tool ID: PSX4603
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Other Chemical Vapor Deposition Equipment
Novellus SCON, 200mm, s/n: 97-47-5431
Tungsten CVD
Tool ID: WCVD-A03
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Other Chemical Vapor Deposition Equipment
Novellus C2-SCON, 200mm, s/n: 00-11-C25866
Novellus Concept 2 Sequel
Tool ID: CAPO-A05
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Other Plasma Processing Equipment and Tools
TEL Alpha-8S, 200mm, s/n: A00009835234
Well Drive Furnace
Tool ID: WDRIV-09
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Other Plasma Processing Equipment and Tools
LAM 2300 E4, 300mm, s/n: 1017439-11-32-0313
MWS 1CH KiyoFX 3CH
Tool ID: ETX2400
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Other Plasma Processing Equipment and Tools
AMAT Endura, 300mm, s/n: 425649
ALD TiAl / TiN
Tool ID: MDX2451
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Other Plasma Processing Equipment and Tools
AMAT 5200 Centura 1, 200mm, s/n: 93A88X
MC IPS
Tool ID: 93A88X
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