Wafer Fabrication Equipment

TEL FORMULA-1S-H 300 mm system, built in 2008 and located in Woodlands, Singapore. Configured as an LPCVD Nitride furnace with a TEL Formula Robot and two FOUP factory interfaces.Specifications Manufacturer: TEL Model: TEL FORMULA-1S-H Vintage: 2008 Wafer Size: 300 mm Serial Number: P00000875063 Location: Woodlands, Singapore Tool ID: DFRN712 Tool Status: Connected Fab Section: Diffusion Software Version: V2.12 Rev.R000 CIM: SECS Process: Nitride Configuration Main System TEL Formula Robot 2 × FOUP Factory Interface

Make: Tel

Model: TEL FORMULA-1S-H

1 unit @ Best Price

LAM Lam 2300 E5 - MWS 1-Chamber KiyoEX 3-Chambers, 300 mm system, built in 2011 and located in Malta, USA. Configured for etch with four chambers. The process is 14LPP FN/RC-SC/RX-DT.Specifications Manufacturer: LAM Model: Lam 2300 E5 - MWS 1-Chamber KiyoEX 3-Chambers Vintage: 2011 Wafer Size: 300 mm Serial Number: 1017439-11-28-0306 Location: Malta, USA Tool ID: ETX2101 Tool Status: Connected Fab Section: Etch Software Version: SP11-HF8-Release Version 1.8.4 Process: 14LPP FN/RC-SC/RX-DT Configuration 4 × Main System

Make: LAM

Model: Lam 2300 E5 - MWS 1-Chamber KiyoEX 3-Chambers

1 unit @ Best Price

Lam Research PEP3510A/A(H) 200 mm system, built in 2000 and located in Woodlands, Singapore. Configured for photoresist stripping with a main tool. The system is used in the etch section and operates with software version 4.0 and GEM CIM interface.Specifications Manufacturer: Lam Research Pte LTD Model: PEP3510A/A(H) Vintage: 2000 Wafer Size: 200 mm Serial Number: M98334 Location: Woodlands, Singapore Tool ID: PSTRP-28 Tool Status: Running Wafers Fab Section: Etch Software Version: 4.0 CIM: GEM Process: Photoresist Stripping Process Configuration Main Tool Not Included 2 × Dry Pumps

Make: Lam Research Pte LTD

Model: PEP3510A/A(H)

1 unit @ Best Price

LAM Lam 2300 E5 - MWS 1-Chamber KiyoEX 4-Chambers, 300 mm system, built in 2014 and located in Malta, USA. Configured for etch with five chambers. The process includes 14LPP FN/RC-SC/FP/RX-DT.Specifications Manufacturer: LAM Model: Lam 2300 E5 - MWS 1-Chamber KiyoEX 4-Chambers Vintage: 2014 Wafer Size: 300 mm Serial Number: 1017439-14-23-1244 Location: Malta, USA Tool ID: ETX21105 Tool Status: Connected Fab Section: Etch Software Version: SP11-HF8-Release Version 1.8.4 Process: 14LPP FN/RC-SC/FP/RX-DT Configuration 5 × Chambers

Make: LAM

Model: Lam 2300 E5 - MWS 1-Chamber KiyoEX 4-Chambers

1 unit @ Best Price

ASML PAS5500 / 700B 200 mm system, built in 1999 and located in Woodlands, Singapore. Configured for DUV scanning with a main body, wafer transfer unit, and SMIF factory interface. The system is used in lithography applications.Specifications Manufacturer: ASML Model: PAS5500 / 700B Vintage: 1999 Wafer Size: 200 mm Serial Number: 3438 Location: Woodlands, Singapore Tool ID: ASCND-01 Tool Status: Connected Fab Section: Lithography Software Version: 8.9.0.c CIM: SECS Process: DUV SCANNER Configuration Main Body Wafer Transfer Unit SMIF Factory Interface Operator Console Unit Not Included 2.5KW TCU

Make: ASML

Model: PAS5500 / 700B

1 unit @ Best Price

Applied Materials Centura Etch 200 mm system, built in 1999 and located in Woodlands, Singapore. Configured for oxide etching with one HP+ robot handler. The system is designed for etch applications.Specifications Manufacturer: Applied Materials Model: CENTURA ETCH Vintage: 1999 Wafer Size: 200 mm Serial Number: EE38 Location: Woodlands, Singapore Tool ID: STRN-11 Tool Status: Running Wafers Fab Section: Etch Software Version: B5.1_16 CIM: SECS Process: OXIDE ETCHER Configuration Main System HP+ Robot Handler Not Included 2 × LPT 3 × Chiller

Make: Applied Materials

Model: CENTURA ETCH

1 unit @ Best Price

GASONICS INTERNATIONAL PEP3510 A 200 mm system, built in 2006 and located in Singapore. Configured for photoresist stripping with a Yaskawa robot handler. The system is part of the etch section.Specifications Manufacturer: Gasonics International Model: PEP3510 A Vintage: 2006 Wafer Size: 200 mm Serial Number: S13959A Location: Singapore Tool ID: STRP-A15 Tool Status: Running Wafers Fab Section: Etch Software Version: 4.0 CIM: GEM Process: Photoresist Stripping Configuration Yaskawa Robot Handler Main Tool Not Included 2 × Dry Pumps 2 × LPT

Make: Gasonics International

Model: PEP3510 A

1 unit @ Best Price

ASM XP4 300 mm system, built in 2012 and located in Malta, USA. Configured for atomic layer deposition with two chambers, a vacuum transfer module, and a FOUP factory interface.Specifications Manufacturer: ASM Model: XP4 Vintage: 2012 Wafer Size: 300 mm Serial Number: 1E0886600-01 Location: Malta, USA Tool ID: RTA2480 Software Version: 1.68c4-003 CIM: unknown Process: ALD Fab Section: Diffusion Configuration Front End with Load Ports Vacuum Transfer Module 2 × Chambers FOUP Factory Interface Not Included 2 × Gate Valves 3 × Computers Back End Robot 2 × Chamber Kits

Make: ASM

Model: XP4

1 unit @ Best Price

TEL FORMULA-1S-H 300 mm system, built in 2008 and located in Woodlands, Singapore. Configured for LPCVD nitride processes with a FOUP factory interface and a TEL Formula robot handler. Suitable for diffusion applications.Specifications Manufacturer: TEL Model: TEL FORMULA-1S-H Vintage: 2008 Wafer Size: 300 mm Serial Number: P00000835025 Location: Woodlands, Singapore Tool ID: DFRN710 Tool Status: Connected Fab Section: Diffusion Software Version: V2.12 Rev.R000 CIM: SECS Process: Nitride Configuration 2 × FOUP Factory Interface Main System TEL Formula Robot Handler

Make: Tel

Model: TEL FORMULA-1S-H

1 unit @ Best Price

AMAT CENTURA POLY 200 mm system, built in 2001 and located in Woodlands, Singapore. Configured for metal etching with a VHP Robot Handler. The system is part of the Etch fab section.Specifications Manufacturer: AMAT Model: CENTURA POLY Vintage: 2001 Wafer Size: 200 mm Serial Number: 566512990-2 Location: Woodlands, Singapore Tool ID: DPLY-502 Tool Status: Running Wafers Fab Section: Etch Software Version: E4.7_25 Process: METAL ETCHER Configuration VHP Robot Handler Not Included 2 × LPT Dry Pump

Make: Applied Materials

Model: CENTURA POLY

1 unit @ Best Price

TEL IndyPlus 300 mm system, built in 2016 and located in Malta, USA. Configured for IRAD Nitride process in the Diffusion section with a main FVX system, a carrier transfer robot, and a FOUP factory interface.Specifications Manufacturer: TEL Model: TEL IndyPlus Vintage: 2016 Wafer Size: 300 mm Serial Number: S000014Y5411 Location: Malta, USA Tool ID: FVX24210 Tool Status: Running Wafers Fab Section: Diffusion Software Version: V8.01 Rev.000[i00E00-00001] CIM: SECS/GEM Process: IRAD Nitride Configuration Main FVX System Carrier Transfer Robot FOUP Factory Interface KHI WHR Handler

Make: Tel

Model: TEL IndyPlus

1 unit @ Best Price

TEL ALPHA-303I-K 300 mm system, built in 2007 and located in Singapore. Configured for MOL anneal furnace processes with a FOUP factory interface and two loadport handlers. Suitable for diffusion applications.Specifications Manufacturer: TEL Model: ALPHA-303I-K Vintage: 2007 Wafer Size: 300 mm Serial Number: L00000745110 Location: Singapore Tool ID: DFML731 (DF-AHS-05) Tool Status: Disconnected Fab Section: Diffusion Software Version: V2.13 Rev.004 CIM: SECS Process: MOL Configuration FOUP Factory Interface 2 × Loadport Handler TEL ALPHA 303I Furnace

Make: Tel

Model: ALPHA-303I-K

1 unit @ Best Price