
TEL Triase+ TiN- TEL Triase+ TiN -, 300 mm, 2022
TEL Triase+ TiN system, 300 mm, built in 2022 and located in Malta, USA. Configured for TiN processing with three EXII process chambers, a Yaskawa dual-arm handler, and a FOUP factory interface. Used in the diffusion section.Specifications Manufacturer: TEL Model: TEL Triase+ TiN- TEL Triase+ TiN - Vintage: 2022 Wafer Size: 300 mm Serial Number: T19599 Location: Malta, USA Tool ID: MDX24705 Tool Status: Connected Fab Section: Diffusion Software Version: V5 750R1 CIM: SECS/GEM Process: TiN Configuration Trias Mainframe 3 × EXII Chamber FOUP Factory Interface Yaskawa Dual Arm Handler Not Included Chamber Gate Valve MFC7 2 × LM-Arm End Effector Pads (Rear) 2 × Chamber APC Valve LM-Robot (Front-End) 3 × Process Kit 2 × LM-Arm End Effector Pads (Front) Chemgaurd ClF3 Cabinet 3 × Chamber Trap










