Manufacturer: Tokyo Electron Ltd
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TEL FSI Zeta, 200mm, s/n: 0131-0020-0203
Batch Process
Tool ID: MIXF-203
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Other Chemical Vapor Deposition Equipment
TEL Tactras Vigus, 300mm, s/n: FA1272
With Vigus Ix BSP Chambers
Tool ID: ETX28512
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TEL / FSI Zeta, 200mm, s/n: 0131-0018-0802
Chemical Resist Stripper
Tool ID: CRSW-A08
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Other Plasma Processing Equipment and Tools
TEL Trias, 300mm, s/n: C14493
MOCVD HfSiO
Tool ID: RTA1451
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Other Plasma Processing Equipment and Tools
TEL Trias, 300mm, s/n: C12403
MOCVD HfSiO
Tool ID: RTA450
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Other Chemical Vapor Deposition Equipment
TEL Tactras Vigus, 300mm, s/n: FA1192
TEL Tactras Vigus ATCC ILDEtch BEOL
Tool ID: ETX28505
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Other Plasma Processing Equipment and Tools
TEL Certas Wing, 300mm, s/n: WJ0039
TEL Certas Wing used for gas etch
Tool ID: DCL21006
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