Manufacturer: Tokyo Electron Ltd
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Other Plasma Processing Equipment and Tools
TEL Alpha-8S, 200mm, s/n: A00009835234
Well Drive Furnace
Tool ID: WDRIV-09
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TEL, P12XL Prober, 300mm, s/n: PH05501, TEL P12XL Prober single foup VIP3A
TEL P12XL Prober single FOUP
Tool ID: 33B4WA
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Other Chemical Vapor Deposition Equipment
TEL Tactras Vigus, 300mm, s/n: FA1272
With Vigus Ix BSP Chambers
Tool ID: ETX28512
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TEL FSI Zeta, 200mm, s/n: 0131-0020-0203
Batch Process
Tool ID: MIXF-203
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TEL / FSI Zeta, 200mm, s/n: 0131-0018-0802
Chemical Resist Stripper
Tool ID: CRSW-A08
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