Industrial Single Wafer Resist Strippers

Lam Research PEP3510A/A(H) 200 mm system, built in 2000 and located in Woodlands, Singapore. Configured for photoresist stripping with a main tool. The system is used in the etch section and operates with software version 4.0 and GEM CIM interface.Specifications Manufacturer: Lam Research Pte LTD Model: PEP3510A/A(H) Vintage: 2000 Wafer Size: 200 mm Serial Number: M98334 Location: Woodlands, Singapore Tool ID: PSTRP-28 Tool Status: Running Wafers Fab Section: Etch Software Version: 4.0 CIM: GEM Process: Photoresist Stripping Process Configuration Main Tool Not Included 2 × Dry Pumps

Make: Lam Research Pte LTD

Model: PEP3510A/A(H)

1 unit @ Best Price

GASONICS INTERNATIONAL PEP3510 A 200 mm system, built in 2006 and located in Singapore. Configured for photoresist stripping with a Yaskawa robot handler. The system is part of the etch section.Specifications Manufacturer: Gasonics International Model: PEP3510 A Vintage: 2006 Wafer Size: 200 mm Serial Number: S13959A Location: Singapore Tool ID: STRP-A15 Tool Status: Running Wafers Fab Section: Etch Software Version: 4.0 CIM: GEM Process: Photoresist Stripping Configuration Yaskawa Robot Handler Main Tool Not Included 2 × Dry Pumps 2 × LPT

Make: Gasonics International

Model: PEP3510 A

1 unit @ Best Price

Mattson Aspen 2 200 mm system, built in 1999 and located in Singapore. Configured for photoresist stripping with a main tool and a Mattson robot arm. The system is designed for use in the etch section of a fab.Specifications Manufacturer: Mattson Model: MATTSON ASPEN 2 Vintage: 1999 Wafer Size: 200 mm Serial Number: 543 Location: Singapore Tool ID: PSTRP-18 Tool Status: Running Wafers Fab Section: Etch Software Version: 5.56E3B CIM: GEM Process: Photoresist Stripping Configuration Main Tool Mattson Robot Arm Not Included 2 × LPT 3 × Dry Pump

Make: MATTSON

Model: MATTSON ASPEN 2

1 unit @ Best Price

Batch Process Tool ID: MIXF-203

Make: Tokyo Electron Ltd

Model: Zeta

1 unit @ Best Price

Chemical Resist Stripper Tool ID: CRSW-A08

Make: Tokyo Electron Ltd

Model: Zeta

1 unit @ Best Price