BROOKS EUV Reticle Stocker, 300mm, s/n: 5387
EUV Reticle Stocker
Tool ID: RST25000
Clean Room Equipment
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Dyna Tech DT-SWM1040A, s/n: DT11172
Semi Auto Tape Mount System
Tool ID: DWFMP01
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Düperthal Dangerous Goods Cabinet, s/n: NA
Chemical storage cabinet
Düperthal UWS-PE-FT B80-6410-A
Tool ID: DGC611
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Düperthal Dangerous Goods Cabinet, s/n: NA
Düperthal UWS-PE-FT B80-6410-A
Tool ID: DGC610
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Daifuku ACLW704 Server, s/n: DG7KEA 2AK250004M, DG7KEA 2BA3100129
SV1 S/N: DG7KEA 2AK250004M
SV2 S/N: DG7KEA 2BA3100129
Tool ID: ACLW704 Server
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Daifuku ACLW702 Server, s/n: DG7KEA 2BA140004B, DG7KEA 2BA140013B
SV1 S/N: DG7KEA 2BA140004B
SV2 S/N: DG7KEA 2BA140013B
Tool ID: ACLW702 Server
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