
TEL INDY PLUS, 300 mm, 2021
TEL INDY PLUS 300 mm system, built in 2021 and located in Malta, USA. Configured for low temperature copper anneal with a KHI 3 Axis, five fork variable pitch handler and two FOUP factory interfaces.Specifications Manufacturer: TEL Model: TEL INDY PLUS Vintage: 2021 Wafer Size: 300 mm Serial Number: S00002120121 Location: Malta, USA Tool ID: FVX26012 Tool Status: Disconnected Fab Section: Implant Software Version: WAVES 8.1 CIM: SECS/GEM Process: Cu-Anneal Configuration 2 × FOUP Factory Interface KHI 3 Axis, Five Fork Variable Pitch Handler Low Temperature Copper Anneal Furnace






