Other Chemical Vapor Deposition Equipment
Novellus SCON, 200mm, s/n: 97-47-5431
Tungsten CVD
Tool ID: WCVD-A03
Other Chemical Vapor Deposition Equipment
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Other Chemical Vapor Deposition Equipment
Novellus C2-SCON, 200mm, s/n: 00-11-C25866
Novellus Concept 2 Sequel
Tool ID: CAPO-A05
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Other Chemical Vapor Deposition Equipment
TEL Tactras Vigus, 300mm, s/n: FA1272
With Vigus Ix BSP Chambers
Tool ID: ETX28512
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Other Chemical Vapor Deposition Equipment
TEL Tactras Vigus, 300mm, s/n: FA1192
TEL Tactras Vigus ATCC ILDEtch BEOL
Tool ID: ETX28505
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Other Chemical Vapor Deposition Equipment
TEL Tactras Vigus, s/n: FA2141
TEL Tactras Vigus LK3
Tool ID: ETX4520
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