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Other Chemical Vapor Deposition Equipment

10 results
  1. Applied Materials Producer GT, 300 mm, 2014
    Other Chemical Vapor Deposition Equipment

    Applied Materials Producer GT, 300 mm, 2014

    Applied Materials Producer GT 300 mm system, built in 2014 and located in Malta, USA. Configured for ATRP process with three chambers, an EFEM with loadlock and buffer, and a FOUP factory interface. Includes Brooks Mag8 FX and Kawasaki ATM robots.Specifications Manufacturer: Applied Materials Model: Producer GT Vintage: 2014 Wafer Size: 300 mm Serial Number: 428276 Location: Malta, USA Tool ID: CVD2854 Fab Section: Thin Film Software Version: pmB4.3_61 CIM: SECS, GEM Process: ATRP Process Configuration EFEM with Loadlock and Buffer Brooks Mag8 FX Robot 3 × FOUP Factory Interface 2 × Kawasaki ATM Robot Not Included Gold Box Chamber Lid Cover Foreline Heater Jacket MF EV Manifold Dry Pump UPS Unit RF Strap

    Make: Applied Materials
    Model: Producer GT
    1 unit @ Best Price
    Sold By: GLOBALFOUNDRIES US, Inc.
    Location: Malta, USA
    Item ID: 271458
  2. AME Precision 5000, 200 mm, 1995
    Other Chemical Vapor Deposition Equipment

    AME Precision 5000, 200 mm, 1995

    AME Precision 5000 200 mm system, built in 1995 and located in Burlington, USA. Configured for ILD processes with a mainframe, a robot handler, and an open cassette factory interface.Specifications Manufacturer: AME Model: Precision 5000 Vintage: 1995 Wafer Size: 200 mm Serial Number: 4373 Location: Burlington, USA Tool ID: 67272V Tool Status: Connected Fab Section: Thin Film Software Version: E5.01E Process: ILD Configuration Mainframe Robot Handler Open Cassette Factory Interface

    Make: AME
    Model: Precision 5000
    1 unit @ Best Price
    Sold By: GLOBALFOUNDRIES US, Inc.
    Location: Burlington, USA
    Item ID: 271448
  3. Wonik IPS MAHA MP, 300 mm, 2019
    Other Chemical Vapor Deposition Equipment

    Wonik IPS MAHA MP, 300 mm, 2019

    Wonik IPS MAHA MP 300 mm system, built in 2019 and located in Malta, USA. Configured for SiON deposition with three chambers, an Ulvac covot-6 VAC robot handler, and a FOUP factory interface. Suitable for thin film applications.Specifications Manufacturer: Wonik IPS Model: MAHA MP Vintage: 2019 Wafer Size: 300 mm Serial Number: SE14PE311 Location: Malta, USA Tool ID: CVD24603 Tool Status: Connected Fab Section: Thin Film Software Version: GF.2.4.2_100 CIM: SECS Process: SiON Configuration EFEM with Loadlocks and Buffer Ulvac Covot-6 VAC Robot Handler 3 × FOUP Factory Interface Not Included 2 × Eurotherm Temp TM Robot Blade 3 × Chuck Heater

    Make: Wonik IPS
    Model: MAHA MP
    1 unit @ Best Price
    Sold By: GLOBALFOUNDRIES US, Inc.
    Location: Malta, USA
    Item ID: 271443
  4. TEL Triase+ TiN- TEL Triase+ TiN -, 300 mm, 2022
    Other Chemical Vapor Deposition Equipment

    TEL Triase+ TiN- TEL Triase+ TiN -, 300 mm, 2022

    TEL Triase+ TiN system, 300 mm, built in 2022 and located in Malta, USA. Configured for TiN processing with three EXII process chambers, a Yaskawa dual-arm handler, and a FOUP factory interface. Used in the diffusion section.Specifications Manufacturer: TEL Model: TEL Triase+ TiN- TEL Triase+ TiN - Vintage: 2022 Wafer Size: 300 mm Serial Number: T19599 Location: Malta, USA Tool ID: MDX24705 Tool Status: Connected Fab Section: Diffusion Software Version: V5 750R1 CIM: SECS/GEM Process: TiN Configuration Trias Mainframe 3 × EXII Chamber FOUP Factory Interface Yaskawa Dual Arm Handler Not Included Chamber Gate Valve MFC7 2 × LM-Arm End Effector Pads (Rear) 2 × Chamber APC Valve LM-Robot (Front-End) 3 × Process Kit 2 × LM-Arm End Effector Pads (Front) Chemgaurd ClF3 Cabinet 3 × Chamber Trap

    Make: Tel
    Model: TEL Triase+ TiN- TEL Triase+ TiN -
    1 unit @ Best Price
    Sold By: GLOBALFOUNDRIES US, Inc.
    Location: Malta, USA
    Item ID: 271441
  5. AMAT_ENDURA2 METAL Cobald CVD_CH, 300 mm, 2017
    Other Chemical Vapor Deposition Equipment

    AMAT_ENDURA2 METAL Cobald CVD_CH, 300 mm, 2017

    AMAT AMAT_ENDURA2 METAL Cobald CVD_CH 300 mm system, built in 2017 and located in Dresden, Germany. Configured for Cobalt CVD with one chamber. Suitable for thin film applications.Specifications Manufacturer: AMAT Model: AMAT_ENDURA2 METAL Cobald CVD_CH Vintage: 2017 Wafer Size: 300 mm Serial Number: 000001 - 406925R12-PJ-ZC Location: Dresden, Germany Tool ID: MDX820CH5 Tool Status: Connected Fab Section: Thin Film Software Version: 2.8274 toolsoftware Process: Cobald CVD Configuration Chamber Not Included Turbo Controller HX 2000

    Make: Applied Materials
    Model: AMAT_ENDURA2 METAL Cobald CVD_CH
    1 unit @ Best Price
    Sold By: GLOBALFOUNDRIES US, Inc.
    Location: Dresden, Germany
    Item ID: 271434
  6. ASM XP4, 300 mm, 2012
    Other Chemical Vapor Deposition Equipment

    ASM XP4, 300 mm, 2012

    ASM XP4 300 mm system, built in 2012 and located in Malta, USA. Configured for atomic layer deposition with two chambers, a vacuum transfer module, and a FOUP factory interface.Specifications Manufacturer: ASM Model: XP4 Vintage: 2012 Wafer Size: 300 mm Serial Number: 1E0886600-01 Location: Malta, USA Tool ID: RTA2480 Software Version: 1.68c4-003 CIM: unknown Process: ALD Fab Section: Diffusion Configuration Front End with Load Ports Vacuum Transfer Module 2 × Chambers FOUP Factory Interface Not Included 2 × Gate Valves 3 × Computers Back End Robot 2 × Chamber Kits

    Make: ASM
    Model: XP4
    1 unit @ Best Price
    Sold By: GLOBALFOUNDRIES US, Inc.
    Location: Malta, USA
    Item ID: 271412
  7. Applied Materials Precision 5000, 200 mm, 1992
    Other Chemical Vapor Deposition Equipment

    Applied Materials Precision 5000, 200 mm, 1992

    Applied Materials Precision 5000 200 mm system, built in 1992 and located in Burlington, USA. Configured for nitride processes with a mainframe, robot handler, and open cassette factory interface.Specifications Manufacturer: Applied Materials Model: Precision 5000 Vintage: 1992 Wafer Size: 200 mm Serial Number: 5908 Location: Burlington, USA Tool ID: 67574V Tool Status: Connected Fab Section: Thin Film Software Version: B5.01E Process: Nitride Configuration Mainframe Robot Handler Open Cassette Factory Interface Included Auxiliary Equipment Scrubber Ozone Generator

    Make: Applied Materials
    Model: Precision 5000
    1 unit @ Best Price
    Sold By: GLOBALFOUNDRIES US, Inc.
    Location: Burlington, USA
    Item ID: 271386
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