Industrial Vertical LPCVD Furnaces

TEL INDY PLUS-I-M 300 mm system, built in 2012 and located in Malta, USA. Configured for Irad Nitride processing with a FOUP factory interface. This tool is part of the diffusion section.Specifications Manufacturer: TEL Model: TEL INDY PLUS-I-M Vintage: 2012 Wafer Size: 300 mm Serial Number: S00001265346 Location: Malta, USA Tool ID: FVX2425 Software Version: TEL Waves Process: Irad Nitride Fab Section: Diffusion Configuration Main System FOUP Factory Interface

Make: Tel

Model: TEL INDY PLUS-I-M

1 unit @ Best Price

TEL TELINDY 300 mm system, built in 2016 and located in Malta, USA. Configured for LT APOLY process in the diffusion section with a wafer transfer robot and a FOUP factory interface.Specifications Manufacturer: TEL Model: TELINDY Vintage: 2016 Wafer Size: 300 mm Serial Number: S00001395165 Location: Malta, USA Tool ID: FVX25300 Software Version: V8.17 Rev.000 [i01500-00000] CIM: SECS, GEM Process: LT APOLY Fab Section: Diffusion Configuration FOUP Factory Interface Wafer Transfer Robot

Make: Tel

Model: TELINDY

1 unit @ Best Price

TEL TELINDY PLUS-A-M 300 mm system, built in 2022 and located in Malta, USA. Configured for HIGH-K processes in the Diffusion section with a wafer transfer robot and a FOUP factory interface.Specifications Manufacturer: TEL Model: TELINDY PLUS-A-M Vintage: 2022 Wafer Size: 300 mm Serial Number: S002210101 Location: Malta, USA Tool ID: FVX25906 Software Version: V8.10 Rev.000 [i01300-00000] CIM: SECS, GEM Process: HIGH-K Fab Section: Diffusion Configuration Wafer Transfer Robot FOUP Factory Interface Not Included Baratron Tree P1 Power Connection Assembly SE-183079 Fin Assembly Disilane Detector P3 P4 Foreline Oring IV7 Sensor Board Behind HMI Screen

Make: Tel

Model: TELINDY PLUS-A-M

1 unit @ Best Price

Hitachi Kokusai DJ-1236VN-DF 300 mm system, built in 2020 and located in Malta, USA. Configured for MT-SiOCN process in the diffusion section with a Toshiba main system, a Hitachi handler system, and a FOUP factory interface.Specifications Manufacturer: Hitachi Kokusai Model: DJ-1236VN-DF Vintage: 2020 Wafer Size: 300 mm Serial Number: T2DW8-11068 Location: Malta, USA Tool ID: FVX23915 Tool Status: Connected Fab Section: Diffusion Software Version: 05.12.02 CIM: GEM Process: MT-SiOCN Configuration 16 × FOUP Factory Interface Handler System Main System Not Included KV-1000 Module For Wafer Break PS21 (Pressure Switch)

Make: Hitachi Kokusai Elec

Model: DJ-1236VN-DF

1 unit @ Best Price

TEL FORMULA-1S-H 300 mm system, built in 2008 and located in Woodlands, Singapore. Configured as an LPCVD Nitride furnace with a TEL Formula Robot and two FOUP factory interfaces.Specifications Manufacturer: TEL Model: TEL FORMULA-1S-H Vintage: 2008 Wafer Size: 300 mm Serial Number: P00000875063 Location: Woodlands, Singapore Tool ID: DFRN712 Tool Status: Connected Fab Section: Diffusion Software Version: V2.12 Rev.R000 CIM: SECS Process: Nitride Configuration Main System TEL Formula Robot 2 × FOUP Factory Interface

Make: Tel

Model: TEL FORMULA-1S-H

1 unit @ Best Price

TEL FORMULA-1S-H 300 mm system, built in 2008 and located in Woodlands, Singapore. Configured for LPCVD nitride processes with a FOUP factory interface and a TEL Formula robot handler. Suitable for diffusion applications.Specifications Manufacturer: TEL Model: TEL FORMULA-1S-H Vintage: 2008 Wafer Size: 300 mm Serial Number: P00000835025 Location: Woodlands, Singapore Tool ID: DFRN710 Tool Status: Connected Fab Section: Diffusion Software Version: V2.12 Rev.R000 CIM: SECS Process: Nitride Configuration 2 × FOUP Factory Interface Main System TEL Formula Robot Handler

Make: Tel

Model: TEL FORMULA-1S-H

1 unit @ Best Price

TEL IndyPlus 300 mm system, built in 2016 and located in Malta, USA. Configured for IRAD Nitride process in the Diffusion section with a main FVX system, a carrier transfer robot, and a FOUP factory interface.Specifications Manufacturer: TEL Model: TEL IndyPlus Vintage: 2016 Wafer Size: 300 mm Serial Number: S000014Y5411 Location: Malta, USA Tool ID: FVX24210 Tool Status: Running Wafers Fab Section: Diffusion Software Version: V8.01 Rev.000[i00E00-00001] CIM: SECS/GEM Process: IRAD Nitride Configuration Main FVX System Carrier Transfer Robot FOUP Factory Interface KHI WHR Handler

Make: Tel

Model: TEL IndyPlus

1 unit @ Best Price

TEL ALPHA-303I-K 300 mm system, built in 2007 and located in Singapore. Configured for MOL anneal furnace processes with a FOUP factory interface and two loadport handlers. Suitable for diffusion applications.Specifications Manufacturer: TEL Model: ALPHA-303I-K Vintage: 2007 Wafer Size: 300 mm Serial Number: L00000745110 Location: Singapore Tool ID: DFML731 (DF-AHS-05) Tool Status: Disconnected Fab Section: Diffusion Software Version: V2.13 Rev.004 CIM: SECS Process: MOL Configuration FOUP Factory Interface 2 × Loadport Handler TEL ALPHA 303I Furnace

Make: Tel

Model: ALPHA-303I-K

1 unit @ Best Price

TEL IndyPlus 300 mm system, built in 2012 and located in Malta, USA. Configured for IRAD Nitride process in the diffusion section with a main FVX system, carrier transfer robot, KHI WTR, and FOUP factory interface.Specifications Manufacturer: TEL Model: TEL IndyPlus Vintage: 2012 Wafer Size: 300 mm Serial Number: S00001255346 Location: Malta, USA Tool ID: FVX24215 Software Version: V8.10 Rev.000 [i01300-00000] CIM: SECS/GEM Process: IRAD Nitride Fab Section: Diffusion Configuration Main FVX System Carrier Transfer Robot KHI WTR FOUP Factory Interface

Make: Tel

Model: TEL IndyPlus

1 unit @ Best Price

Lowk Deposition Furnace Tool ID: FVX23902

Make: Hitachi Kokusai

Model: Quixace

1 unit @ Best Price

TiN ALD Tool ID: FVX2487

Make: Hitachi Kokusai

Model: Quixace - DJ-1236VN-DF

1 unit @ Best Price

MT-TiN Tool ID: FVX2488

Make: Hitachi Kokusai

Model: Quixace - DJ-1236VN-DF

1 unit @ Best Price