HITACHI KOKUSAI Quixace - DJ-1236VN-DF, 300mm, s/n: DN23300
MT-TiN
Tool ID: FVX2488
Manufacturer: Hitachi Kokusai
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Hitachi Kokusai Quixace, 300mm, s/n: T2DC6-16386
Lowk Deposition Furnace
Tool ID: FVX23902
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HITACHI KOKUSAI Quixace - DJ-1236VN-DF, 300mm, s/n: T2DC6-16595-1
TiN ALD
Tool ID: FVX2487
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