ASM XP4, 300 mm, 2012
ASM XP4 300 mm system, built in 2012 and located in Malta, USA. Configured for atomic layer deposition with two chambers, a vacuum transfer module, and a FOUP factory interface.Specifications Manufacturer: ASM Model: XP4 Vintage: 2012 Wafer Size: 300 mm Serial Number: 1E0886600-01 Location: Malta, USA Tool ID: RTA2480 Software Version: 1.68c4-003 CIM: unknown Process: ALD Fab Section: Diffusion Configuration Front End with Load Ports Vacuum Transfer Module 2 × Chambers FOUP Factory Interface Not Included 2 × Gate Valves 3 × Computers Back End Robot 2 × Chamber Kits
Make: ASM
Model: XP4
1 unit @ Best Price
Sold By: GLOBALFOUNDRIES US, Inc.
Location: Malta, USA
Item ID: 271412
