Other Plasma Processing Equipment and Tools
ASM MIR3000, 300mm, s/n: 2100-141790
ASM XP5 Mainframe with 2 MIR3000 process chambers
PEALD Oxide
Tool ID: RTA24501
Manufacturer: ASM
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Other Plasma Processing Equipment and Tools
ASM MIR3000, 300mm, s/n: 2100-131190
ASM XP5 Mainframe with 2 MIR3000 process chambers
PEALD Oxide
Tool ID: RTA24500
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