LAM Research Metal M, Strip45 300 mm system, built in 2012 and located in Malta, USA. Configured for HMO RIE etch processes with a 2300E5 main system, two robot handlers, and a FOUP factory interface.Specifications

• Manufacturer: LAM Research
• Model: Metal M, Strip45
• Vintage: 2012
• Wafer Size: 300 mm
• Serial Number: 1017439-12-25-0606
• Location: Malta, USA
• Tool ID: ETX2922
• Tool Status: Connected
• Fab Section: Etch
• Software Version: 1.8.4-SP19HF5
• CIM: GEM
• Process: HMO RIEConfiguration
  • 2300E5 Main System
  • 2 × Robot Handler
  • 3 × FOUP Factory InterfaceNot Included
    • Manometer
    • 10 × Some Missing Parts on PM5
    • TCW Heater on PM2