
Temescal VES-2550, 200mm, s/n: 219
Tool ID: FEVA201
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Tool ID: FEVA201

RIE Silicon Etcher with 2x P5000 chm Tool ID: EP5K301

ICP Asher Tool ID: EMAT303

ICP Asher Tool ID: EMAT301

ICP Asher Tool ID: EMAT202

the tel indy plus is a low temperature copper anneal furnace, manufactured by tel in 2021, located in malta, usa. Key features include a software version of waves 8.1 and cim compatibility with secs/gem. The hardware configuration comprises a factory interface with 2 units, a handler system with khi 3 axis and five fork variable pitch options, and a main system. Tool ID: FVX26012

Dry Etch Tool ID: ETX656

ASM XP5 Mainframe with 2 MIR3000 process chambers PEALD Oxide Tool ID: RTA24501

ASM XP5 Mainframe with 2 MIR3000 process chambers PEALD Oxide Tool ID: RTA24500

MOCVD HfSiO Tool ID: RTA1451

MOCVD HfSiO Tool ID: RTA450

LAM VEXL SOLA MOD. Tool ID: UVC25106