Laboratory Equipment

  1. KLA SpectraShape 9010, 300mm, s/n: 7271469

    Other Optical Inspection

    KLA SpectraShape 9010, 300mm, s/n: 7271469

    Optical Critical Dimensions

    Tool ID: OCD2950

  2. Hitachi S-9220, 200mm, s/n: 9749-10

    Scanning Electron Microscopes

    Hitachi S-9220, 200mm, s/n: 9749-10

    CD Measurement

    Tool ID: FSEM-X01

  3. Cameca IMS 6F, s/n: 643

    Other Scientific and Laboratory Equipment

    Cameca IMS 6F, s/n: 643

    Secondary Ion Mass Spectrometer

    Tool ID: MAL9250

  4. JEOL JEM ARM-200CF, s/n: EM1710001350-135

    Other Optical Inspection

    JEOL JEM ARM-200CF, s/n: EM1710001350-135

    Transmission Electron Microscope

    Tool ID: MAL2105

  5. Zeiss Orion NanoFab, s/n: 6015

    Scanning Electron Microscopes

    Zeiss Orion NanoFab, s/n: 6015

    Focus Ion Beam Mill

    Tool ID: PKG9120

  6. KLA ASET-F5x, 300mm, s/n: 7250640

    Other Scientific and Laboratory Equipment

    KLA ASET-F5x, 300mm, s/n: 7250640

    Film Thickness Measurement

    Tool ID: MFLM722

  7. KLA ASET-F5x, 300mm, s/n: 7250629

    Other Scientific and Laboratory Equipment

    KLA ASET-F5x, 300mm, s/n: 7250629

    Film Thickness Measurement

    Tool ID: MFLM714

  8. KLA ASET-F5x, 300mm, s/n: 200608080722

    Other Scientific and Laboratory Equipment

    KLA ASET-F5x, 300mm, s/n: 200608080722

    Film Thickness Measurement

    Tool ID: MFLM710

  9. KLA ASET-F5x, 300mm, s/n: 200507080592

    Other Scientific and Laboratory Equipment

    KLA ASET-F5x, 300mm, s/n: 200507080592

    Film Thickness Measurement

    Tool ID: MFLM707

  10. Rudolph S3000-S, 300mm, s/n: S-1032

    Wafer Inspection Microscopes

    Rudolph S3000-S, 300mm, s/n: S-1032

    Film Measurement

    Tool ID: THK2151

  11. Bruker D8 Fabline, 300mm, s/n: 209121

    Xray Diffractometers

    Bruker D8 Fabline, 300mm, s/n: 209121

    Dual Port X-Ray Diffractometer

    Tool ID: THK28002

  12. Nova 3090next, 300mm, s/n: 4162MN

    Other Optical Inspection

    Nova 3090next, 300mm, s/n: 4162MN

    NOVA 3090 Next w/OCD 2D Option

    Tool ID: POL202U3