Laboratory Equipment

Novellus INOVA 200 mm system, built in 2022 and located in Singapore. Configured for CUSEED process with a mainframe, two SMIF factory interfaces, and two robot handlers.Specifications Manufacturer: Novellus Model: INOVA Vintage: 2022 Wafer Size: 200 mm Location: Singapore Tool ID: FCUD-X01 Tool Status: Disconnected Fab Section: Thin Film CIM: GEM Process: CUSEED Configuration Mainframe 2 × SMIF Factory Interface 2 × Robot Handler

Make: NOVELLUS

Model: INOVA

1 unit @ Best Price

KLA AIT - UV 300 mm system, built in 2004 and located in Singapore. Configured for darkfield inspection with an inspection unit, robot handler, and FOUP factory interface. Suitable for defect detection applications.Specifications Manufacturer: KLA Model: AIT - UV Vintage: 2004 Wafer Size: 300 mm Serial Number: UV1070 Location: Singapore Tool ID: YDFI704 Fab Section: Defect Detection Software Version: 6.3.24 CIM: SECS/GEM Process: Darkfield Inspection Configuration Inspection Unit Robot Handler FOUP Factory Interface Not Included Laser Power Supply 5 × Optic Parts Laser

Make: KLA

Model: AIT - UV

1 unit @ Best Price

AMAT VeritySEM 300 mm system, built in 2007 and located in Woodlands, Singapore. Configured for CDSEM measurement with a main frame, VHP robot handler, and three FOUP factory interfaces. Suitable for metrology applications.Specifications Manufacturer: AMAT Model: VeritySEM Vintage: 2007 Wafer Size: 300 mm Serial Number: U808 Location: Woodlands, Singapore Tool ID: MSEM736 (PM-CDA-51) Tool Status: Disconnected Fab Section: Metrology Software Version: 1440b CIM: SEC/GEM Process: CDSEM Configuration Main Frame AMAT FI 3 × FOUP Factory Interface

Make: Applied Materials

Model: VeritySEM

1 unit @ Best Price

AMAT NanoSEM 3D 300 mm system, built in 2004 and located in Woodlands, Singapore. Configured for CDSEM metrology with an ETU handler and a FOUP factory interface.Specifications Manufacturer: AMAT Model: NanoSEM 3D Vintage: 2004 Wafer Size: 300 mm Serial Number: U-666 Location: Woodlands, Singapore Tool ID: MSEM762 (F7 MSEM703) Tool Status: Disconnected Fab Section: Metrology Software Version: 14.3.0 CIM: SECS/GEM Process: CDSEM Configuration FOUP Factory Interface ETU Handler Main System

Make: Applied Materials

Model: NanoSEM 3D

1 unit @ Best Price

KLA KLA-SpectraShape9010 300 mm system, built in 2013 and located in Malta, USA. Configured for optical critical dimensions with a KT Tencor robot handler, three FOUP factory interfaces, and SS10k subsystems. Designed for metrology applications.Specifications Manufacturer: KLA Model: KLA-SpectraShape9010 Vintage: 2013 Wafer Size: 300 mm Serial Number: 7271469 Location: Malta, USA Tool ID: OCD2950 Software Version: rev 6.20.31.11001 CIM: SECS/GEM Process: Optical Critical Dimensions Fab Section: Metrology Configuration KT Tencor Robot Handler 3 × FOUP Factory Interface SS10k Subsystem RPRC SS10k Subsystem RP SS10k Subsystem LDSR

Make: KLA

Model: KLA-SpectraShape9010

1 unit @ Best Price

KLA AITII 200 mm system, built in 2000 and located in Singapore. Configured for defect detection with a SMIF factory interface. Software version AIT and CIM interface SECS.Specifications Manufacturer: KLA Model: AITII Vintage: 2000 Wafer Size: 200 mm Serial Number: 3000020247 Location: Singapore Tool ID: DAIT-503 Tool Status: Connected Fab Section: Defect Detection Software Version: AIT CIM: SECS Process: DFECT Configuration Main Body Stage 2 × SMIF Factory Interface

Make: KLA

Model: AITII

1 unit @ Best Price

KLA OP524107I 200 mm system, built in 2002 and located in Woodlands, Singapore. Configured for thickness measurement in the diffusion section with a robot handler and dual SMIF factory interfaces.Specifications Manufacturer: KLA Model: OP524107I Vintage: 2002 Wafer Size: 200 mm Serial Number: 524107 Location: Woodlands, Singapore Tool ID: OPTI-11 Fab Section: Diffusion Software Version: DOS CIM: SECS Process: THICKNESS Configuration Main System Robot Handler 2 × SMIF Factory Interface

Make: KLA

Model: OP524107I

1 unit @ Best Price

HSEB ODIN-A30 300 mm system, built in 2012 and located in Dresden, Germany. Configured for wafer inspection with an automated wafer handling system and two FOUP factory interfaces. Designed for defect detection applications.Specifications Manufacturer: HSEB Model: ODIN-A30 Vintage: 2012 Wafer Size: 300 mm Serial Number: 2100168 Location: Dresden, Germany Tool ID: AMI801 Tool Status: Warehouse Fab Section: Defect Detection Software Version: TC*1.15.5/10.2.00 CIM: SECS/GEM Process: Wafer Inspection Tool Configuration Meas System Automated Wafer Handling 2 × FOUP Factory Interface

Make: HSEB

Model: ODIN-A30

1 unit @ Best Price

KLA SL536-T3 to T4 Upgrade TeraScanHR SLdd Model, built in 2005 and located in Dresden, Germany. Configured for photomask inspection with a SMIF factory interface and a KLA reticle loader. The system is designed for lithography applications.Specifications Manufacturer: KLA Model: SL536-T3 to T4 Upgrade TeraScanHR SLdd Model Vintage: 2005 Serial Number: 5041 Location: Dresden, Germany Tool ID: RDI101 Software Version: 4.7.6. CIM: SECS, GEM Process: Photomask Inspection Fab Section: Lithography Configuration SMIF Factory Interface Front End PC with Monitor KLA Reticle Loader V1/V2/V3 Linux/Unix Options System Main System with Stage and Loader

Make: KLA

Model: SL536-T3 to T4 Upgrade TeraScanHR SLdd Model

1 unit @ Best Price

Thermo Fischer (FEI) DB STRATA400 system, built in 2005 and located in Dresden, Germany. Configured for sample analysis and measurement, it features a fully digital Field Emission Scanning Electron Microscope (FE-SEM) with Focused Ion Beam (FIB) technology for failure analysis.Specifications Manufacturer: Thermo Fischer (FEI) Model: DB STRATA400 Vintage: 2005 Serial Number: D1053 Location: Dresden, Germany Tool ID: FIB302 Tool Status: Connected Fab Section: Failure Analysis Process: Sample Analysis / Measurement Configuration Main Tool Not Included Chiller

Make: Thermo Fischer (FEI)

Model: DB STRATA400

1 unit @ Best Price

KLA KLA2138-IS 200 mm system, built in 1999 and located in Singapore. Configured for defect detection with a SMIF factory interface. Software version KLA2138 and CIM SEC.Specifications Manufacturer: KLA Model: KLA2138-IS Vintage: 1999 Wafer Size: 200 mm Serial Number: W21XX1149 Location: Singapore Tool ID: DMON-502 Tool Status: Connected Fab Section: Defect Detection Software Version: KLA2138 CIM: SEC Process: DEFECT Configuration 2 × SMIF Factory Interface Main System

Make: KLA

Model: KLA2138-IS

1 unit @ Best Price

KLA KLA2138-IS 200 mm system, built in 2000 and located in Singapore. Configured for defect detection with a stage handler and two SMIF factory interfaces. Software version KLA2138 and CIM SEC.Specifications Manufacturer: KLA Model: KLA2138-IS Vintage: 2000 Wafer Size: 200 mm Serial Number: W21XX1220 Location: Singapore Tool ID: DMON-503 Tool Status: Connected Fab Section: Defect Detection Software Version: KLA2138 CIM: SEC Process: DFEC Configuration Stage Handler Main Body 2 × SMIF Factory Interface

Make: KLA

Model: KLA2138-IS

1 unit @ Best Price