KLA-Tencor AIT II, 200mm, s/n: 9262
AIT II w/ ADC. Defect Inspection Tool
Tool ID: V13V
Manufacturer: KLA -Tencor
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KLA SpectraShape 9010, 300mm, s/n: 7271469
Optical Critical Dimensions
Tool ID: OCD2950
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KLA Tencor SUN Microsystems, s/n: UTID 4080010
Offline defect review station
Tool ID: Teraview 1
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KLA Tencor AIT II, 200mm, s/n: 9145
KLA-Tencor AIT II w/ ADC. Defect Inspection
Tool ID: J78X
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KLA-Tencor AIT II, 200mm, s/n: 9152
AIT II w/ ADC. Defect Inspection
Tool ID: X25V
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KLA Tencor AIT II, 200mm, s/n: 9234
AIT II w/ ADC. Defect Inspection Tool
Tool ID: V12V
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