Scanning Electron Microscopes
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KLA-TENCOR EDR 5210, 300mm, s/n: 5040132
Defect Review
Tool ID: YSEM774
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KLA-TENCOR EDR 5210, 300mm, s/n: 5040134
Defect Review
Tool ID: YSEM773
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KLA-TENCOR EDR 5210, 300mm, s/n: 5040135
Defect Review
Tool ID: YSEM772
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KLA-TENCOR EDR 5200, 300mm, s/n: 5040128
Defect Review
Tool ID: YSEM771
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HMI ESCAN380, 300mm, s/m: FF02002
EBEAM Inspection
Tool ID: YEBI731 (F7 YEBI703)
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