Other Optical Inspection Equipment

KLA KLA-SpectraShape9010 300 mm system, built in 2013 and located in Malta, USA. Configured for optical critical dimensions with a KT Tencor robot handler, three FOUP factory interfaces, and SS10k subsystems. Designed for metrology applications.Specifications Manufacturer: KLA Model: KLA-SpectraShape9010 Vintage: 2013 Wafer Size: 300 mm Serial Number: 7271469 Location: Malta, USA Tool ID: OCD2950 Software Version: rev 6.20.31.11001 CIM: SECS/GEM Process: Optical Critical Dimensions Fab Section: Metrology Configuration KT Tencor Robot Handler 3 × FOUP Factory Interface SS10k Subsystem RPRC SS10k Subsystem RP SS10k Subsystem LDSR

Make: KLA

Model: KLA-SpectraShape9010

1 unit @ Best Price

KLA OP524107I 200 mm system, built in 2002 and located in Woodlands, Singapore. Configured for thickness measurement in the diffusion section with a robot handler and dual SMIF factory interfaces.Specifications Manufacturer: KLA Model: OP524107I Vintage: 2002 Wafer Size: 200 mm Serial Number: 524107 Location: Woodlands, Singapore Tool ID: OPTI-11 Fab Section: Diffusion Software Version: DOS CIM: SECS Process: THICKNESS Configuration Main System Robot Handler 2 × SMIF Factory Interface

Make: KLA

Model: OP524107I

1 unit @ Best Price

KLA SL536-T3 to T4 Upgrade TeraScanHR SLdd Model, built in 2005 and located in Dresden, Germany. Configured for photomask inspection with a SMIF factory interface and a KLA reticle loader. The system is designed for lithography applications.Specifications Manufacturer: KLA Model: SL536-T3 to T4 Upgrade TeraScanHR SLdd Model Vintage: 2005 Serial Number: 5041 Location: Dresden, Germany Tool ID: RDI101 Software Version: 4.7.6. CIM: SECS, GEM Process: Photomask Inspection Fab Section: Lithography Configuration SMIF Factory Interface Front End PC with Monitor KLA Reticle Loader V1/V2/V3 Linux/Unix Options System Main System with Stage and Loader

Make: KLA

Model: SL536-T3 to T4 Upgrade TeraScanHR SLdd Model

1 unit @ Best Price

KLA-TENCOR ASET-F5x 300 mm system, built in 2008 and located in Singapore. Configured for film thickness measurement with a KLA Phoenix 2 handler and two FOUP factory interfaces. Designed for thickness film measurement applications.Specifications Manufacturer: KLA-TENCOR Model: ASET-F5x Vintage: 2008 Wafer Size: 300 mm Serial Number: 7250623 Location: Singapore Tool ID: MFLM731 Fab Section: Metrology Software Version: Summit 4.9 CIM: SECs/GEM Process: Thickness Film Measurement Configuration Main System KLA Phoenix 2 Handler 2 × FOUP Factory Interface

Make: KLA-Tencor

Model: ASET-F5x

1 unit @ Best Price

KLA UV1050 200 mm system, built in 2009 and located in Singapore. Configured for film thickness measurement with a robot handler and a SMIF factory interface. This metrology tool features the SUMMIT 2.40.16 software version and SECS CIM interface.Specifications Manufacturer: KLA Model: UV1050 Vintage: 2009 Wafer Size: 200 mm Serial Number: 950373UV1050 Location: Singapore Tool ID: FLMTK-04 Tool Status: Connected Fab Section: Metrology Software Version: SUMMIT 2.40.16 CIM: SECS Process: Film thickness measurement tool Configuration SMIF Factory Interface Robot Handler Main Body

Make: KLA

Model: UV1050

1 unit @ Best Price

KLA-TENCOR ASET-F5x 300 mm system, built in 2008 and located in Singapore. Configured for film thickness measurement with an ASYST S3 handler and two FOUP factory interfaces. Designed for metrology applications.Specifications Manufacturer: KLA-TENCOR Model: ASET-F5x Vintage: 2008 Wafer Size: 300 mm Serial Number: 7250630 Location: Singapore Tool ID: MFLM713 Software Version: Summit 4.9 CIM: SECs/GEM Process: Thickness Film Measurement Fab Section: Metrology Configuration 2 × FOUP Factory Interface ASYST S3 Handler

Make: KLA-Tencor

Model: ASET-F5x

1 unit @ Best Price

Transmission Electron Microscope Tool ID: MAL2105

Make: JEOL

Model: JEM ARM-200CF

1 unit @ Best Price

Wafer Inspection Tool Tool ID: INS904

Make: SOLVISION

Model: Precis 3D

1 unit @ Best Price

Wafer Inspection Tool Tool ID: INS903

Make: SOLVISION

Model: Precis 3D

1 unit @ Best Price

Wafer Inspection Tool Tool ID: INS900Y1

Make: SOLVISION

Model: Precis 3D

1 unit @ Best Price

Wafer Inspection Tool Tool ID: INS906

Make: SOLVISION

Model: PRECIS 3D

1 unit @ Best Price