
KLA-TENCOR ASET-F5x, 300 mm, 2008
KLA-TENCOR ASET-F5x 300 mm system, built in 2008 and located in Singapore. Configured for film thickness measurement with an ASYST S3 handler and two FOUP factory interfaces. Designed for metrology applications.Specifications Manufacturer: KLA-TENCOR Model: ASET-F5x Vintage: 2008 Wafer Size: 300 mm Serial Number: 7250630 Location: Singapore Tool ID: MFLM713 Software Version: Summit 4.9 CIM: SECs/GEM Process: Thickness Film Measurement Fab Section: Metrology Configuration 2 × FOUP Factory Interface ASYST S3 Handler










