Laboratory Equipment

KLA AITII 200 mm system, built in 2000 and located in Singapore. Configured for defect detection with a SMIF factory interface. Software version AIT and CIM SEC.Specifications Manufacturer: KLA Model: AITII Vintage: 2000 Wafer Size: 200 mm Serial Number: 3099110249 Location: Singapore Tool ID: DAIT-502 Fab Section: Defect Detection Software Version: AIT CIM: SEC Process: DFECT Configuration 2 × SMIF Factory Interface

Make: KLA

Model: AITII

1 unit @ Best Price

KLA KLA2138-IS 200 mm system, built in 1998 and located in Singapore. Configured for defect inspection with a stage handler and two SMIF factory interfaces.Specifications Manufacturer: KLA Model: KLA2138-IS Vintage: 1998 Wafer Size: 200 mm Serial Number: W21XX1081 Location: Singapore Tool ID: DMON-501 Tool Status: Connected Fab Section: Defect Detection Software Version: KLA2138-IS CIM: SECS Process: DEFECT INSPECTION Configuration Stage Handler 2 × SMIF Factory Interface

Make: KLA

Model: KLA2138-IS

1 unit @ Best Price

Applied Materials Complus 4T 300 mm system, built in 2004 and located in Woodlands, Singapore. Configured for darkfield inspection with a robot handler and a FOUP factory interface.Specifications Manufacturer: Applied Materials Model: Complus 4T Vintage: 2004 Wafer Size: 300 mm Serial Number: T268 Location: Woodlands, Singapore Tool ID: YDFI703 Tool Status: Connected Fab Section: Defect Detection Software Version: V10.6 CIM: SECS/GEM Process: Darkfield Inspection Configuration Robot Handler FOUP Factory Interface

Make: Applied Materials

Model: Complus 4T

1 unit @ Best Price

KLA KLA-PUMA9000 300 mm system, built in 2005 and located in Woodlands, Singapore. Configured for darkfield inspection with an inspection unit, a robot handler, and a FOUP factory interface. Suitable for defect detection applications.Specifications Manufacturer: KLA Model: KLA-PUMA9000 Vintage: 2005 Wafer Size: 300 mm Serial Number: 1042 Location: Woodlands, Singapore Tool ID: YDFI791 Tool Status: Connected Fab Section: Defect Detection Software Version: 9.5.410.2.7 CIM: SECS/GEM Process: Darkfield Inspection Configuration FOUP Factory Interface Inspection Unit Robot Handler Included Auxiliary Equipment Chiller Not Included KVM SAC Board

Make: KLA

Model: KLA-PUMA9000

1 unit @ Best Price

KLA-TENCOR ASET-F5x 300 mm system, built in 2008 and located in Singapore. Configured for film thickness measurement with a KLA Phoenix 2 handler and two FOUP factory interfaces. Designed for thickness film measurement applications.Specifications Manufacturer: KLA-TENCOR Model: ASET-F5x Vintage: 2008 Wafer Size: 300 mm Serial Number: 7250623 Location: Singapore Tool ID: MFLM731 Fab Section: Metrology Software Version: Summit 4.9 CIM: SECs/GEM Process: Thickness Film Measurement Configuration Main System KLA Phoenix 2 Handler 2 × FOUP Factory Interface

Make: KLA-Tencor

Model: ASET-F5x

1 unit @ Best Price

KLA AIT UV 300 mm system, built in 2002 and located in Woodlands, Singapore. Configured for darkfield inspection with a robot handler and a FOUP factory interface.Specifications Manufacturer: KLA Model: AIT UV Vintage: 2002 Wafer Size: 300 mm Serial Number: UV1004R Location: Woodlands, Singapore Tool ID: YDFI736 Tool Status: Connected Fab Section: Defect Detection Software Version: 6.3.24.3 CIM: SECS/GEM Process: Darkfield Inspection Configuration Inspection Unit FOUP Factory Interface Robot Handler

Make: KLA

Model: AIT UV

1 unit @ Best Price

KLA KLA-2367 300 mm system, built in 2009 and located in Woodlands, Singapore. Configured for brightfield inspection in defect detection with an inspection unit, a robot handler, and a FOUP factory interface.Specifications Manufacturer: KLA Model: KLA-2367 Vintage: 2009 Wafer Size: 300 mm Serial Number: 1333145R Location: Woodlands, Singapore Tool ID: YBFI707 Tool Status: Connected Fab Section: Defect Detection Software Version: 104507 CIM: SECS/GEM Process: Brightfield Inspection Configuration Robot Handler Inspection Unit FOUP Factory Interface Not Included SGB Board Exhaust Tubing Hose 3" Metallic G5 Host Node TCD Board 13 × G5 Nodes and RTAP

Make: KLA

Model: KLA-2367

1 unit @ Best Price

Applied Materials Verity 1 SEM 300 mm system, built in 2004 and located in Woodlands, Singapore. Configured for CD SEM measurement in metrology with a FOUP factory interface. Software version 1440b and SEC/GEM CIM interface included.Specifications Manufacturer: AMAT Model: Applied Materials Verity 1 SEM Vintage: 2004 Wafer Size: 300 mm Serial Number: U710 Location: Woodlands, Singapore Tool ID: MSEM737 (F7 MSEM705) Tool Status: Disconnected Fab Section: Metrology Software Version: 1440b CIM: SEC/GEM Process: CD SEM Measurement Configuration 3 × FOUP Factory Interface Main Frame AMAT FI Handler Not Included VACR HVPS

Make: Applied Materials

Model: Applied Materials Verity 1 SEM

1 unit @ Best Price

KLA UV1050 200 mm system, built in 2009 and located in Singapore. Configured for film thickness measurement with a robot handler and a SMIF factory interface. This metrology tool features the SUMMIT 2.40.16 software version and SECS CIM interface.Specifications Manufacturer: KLA Model: UV1050 Vintage: 2009 Wafer Size: 200 mm Serial Number: 950373UV1050 Location: Singapore Tool ID: FLMTK-04 Tool Status: Connected Fab Section: Metrology Software Version: SUMMIT 2.40.16 CIM: SECS Process: Film thickness measurement tool Configuration SMIF Factory Interface Robot Handler Main Body

Make: KLA

Model: UV1050

1 unit @ Best Price

Applied Materials Complus 4T 300 mm system, built in 2008 and located in Woodlands, Singapore. Configured for darkfield inspection in the defect detection section with a FOUP factory interface.Specifications Manufacturer: Applied Materials Model: Complus 4T Vintage: 2008 Wafer Size: 300 mm Serial Number: T2160 Location: Woodlands, Singapore Tool ID: YDFI761 Tool Status: Connected Fab Section: Defect Detection Software Version: v10.6 CIM: SECS/GEM Process: Darkfield Inspection Configuration Main Tool FOUP Factory Interface Robot Handler

Make: Applied Materials

Model: Complus 4T

1 unit @ Best Price

KLA TENCOR KLA ARCHER A10XT 200 mm system, built in 2000 and located in Singapore. Configured for overlay measurement in metrology with a robot handler and two SMIF factory interfaces.Specifications Manufacturer: KLA Tencor Model: KLA ARCHER A10XT Vintage: 2000 Wafer Size: 200 mm Serial Number: 3257 Location: Singapore Tool ID: OVLY-A06 Fab Section: Metrology CIM: SECS Process: OVERLAY MEASUREMENT Configuration Main Unit 2 × SMIF Factory Interface Robot Unit

Make: KLA Tencor

Model: KLA ARCHER A10XT

1 unit @ Best Price

Applied Materials G2 300 mm system, built in 2011 and located in Singapore. Configured for defect review with a SEMVision G2 main system, a robot handler, and two FOUP factory interfaces. Part of the metrology section.Specifications Manufacturer: Applied Materials South East Asia Pte. Ltd.W Model: G2 Vintage: 2011 Wafer Size: 300 mm Serial Number: W-242 Location: Singapore Tool ID: YSEM734 Tool Status: Connected Fab Section: Metrology Software Version: 5.4.500 CIM: SEC/GEM Process: Defect review sem Configuration SEMVision G2 Robot Handler 2 × FOUP Factory Interface Included Auxiliary Equipment Electronic Rack

Make: Applied Materials South East Asia Pte. Ltd.W

Model: G2

1 unit @ Best Price