
KLA-Tencor AIT II, 200mm, s/n: 9152
AIT II w/ ADC. Defect Inspection Tool ID: X25V
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AIT II w/ ADC. Defect Inspection Tool ID: X25V

AIT II w/ ADC. Defect Inspection Tool Tool ID: V13V

AIT II w/ ADC. Defect Inspection Tool Tool ID: V12V

Film Measurement Tool ID: THK2550
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Darkfield inspection Tool ID: YDFI731

Wafer scanning Tool ID: YDFI735

Wafer scanning Tool ID: YDFI734

Wafer scanning Tool ID: YDFI733

Wafer scanning Tool ID: YDFI732

Defect review SEM Tool ID: YSEM732

Wafer Inspection Tool Tool ID: INS906

Cold. Not working parts include: Tango Controller (Microscope Stage controller Joystick and keyboard controller Micromotor for fingers edge gripper few powers supplies The tool was running with Windows XP professional 2002 service pack 3. Tool ID: OPI2800