Optical Inspection Equipment

KLA KLA2138-IS 200 mm system, built in 1998 and located in Singapore. Configured for defect inspection with a stage handler and two SMIF factory interfaces.Specifications Manufacturer: KLA Model: KLA2138-IS Vintage: 1998 Wafer Size: 200 mm Serial Number: W21XX1081 Location: Singapore Tool ID: DMON-501 Tool Status: Connected Fab Section: Defect Detection Software Version: KLA2138-IS CIM: SECS Process: DEFECT INSPECTION Configuration Stage Handler 2 × SMIF Factory Interface

Make: KLA

Model: KLA2138-IS

1 unit @ Best Price

Applied Materials Complus 4T 300 mm system, built in 2004 and located in Woodlands, Singapore. Configured for darkfield inspection with a robot handler and a FOUP factory interface.Specifications Manufacturer: Applied Materials Model: Complus 4T Vintage: 2004 Wafer Size: 300 mm Serial Number: T268 Location: Woodlands, Singapore Tool ID: YDFI703 Tool Status: Connected Fab Section: Defect Detection Software Version: V10.6 CIM: SECS/GEM Process: Darkfield Inspection Configuration Robot Handler FOUP Factory Interface

Make: Applied Materials

Model: Complus 4T

1 unit @ Best Price

KLA KLA-PUMA9000 300 mm system, built in 2005 and located in Woodlands, Singapore. Configured for darkfield inspection with an inspection unit, a robot handler, and a FOUP factory interface. Suitable for defect detection applications.Specifications Manufacturer: KLA Model: KLA-PUMA9000 Vintage: 2005 Wafer Size: 300 mm Serial Number: 1042 Location: Woodlands, Singapore Tool ID: YDFI791 Tool Status: Connected Fab Section: Defect Detection Software Version: 9.5.410.2.7 CIM: SECS/GEM Process: Darkfield Inspection Configuration FOUP Factory Interface Inspection Unit Robot Handler Included Auxiliary Equipment Chiller Not Included KVM SAC Board

Make: KLA

Model: KLA-PUMA9000

1 unit @ Best Price

KLA-TENCOR ASET-F5x 300 mm system, built in 2008 and located in Singapore. Configured for film thickness measurement with a KLA Phoenix 2 handler and two FOUP factory interfaces. Designed for thickness film measurement applications.Specifications Manufacturer: KLA-TENCOR Model: ASET-F5x Vintage: 2008 Wafer Size: 300 mm Serial Number: 7250623 Location: Singapore Tool ID: MFLM731 Fab Section: Metrology Software Version: Summit 4.9 CIM: SECs/GEM Process: Thickness Film Measurement Configuration Main System KLA Phoenix 2 Handler 2 × FOUP Factory Interface

Make: KLA-Tencor

Model: ASET-F5x

1 unit @ Best Price

KLA AIT UV 300 mm system, built in 2002 and located in Woodlands, Singapore. Configured for darkfield inspection with a robot handler and a FOUP factory interface.Specifications Manufacturer: KLA Model: AIT UV Vintage: 2002 Wafer Size: 300 mm Serial Number: UV1004R Location: Woodlands, Singapore Tool ID: YDFI736 Tool Status: Connected Fab Section: Defect Detection Software Version: 6.3.24.3 CIM: SECS/GEM Process: Darkfield Inspection Configuration Inspection Unit FOUP Factory Interface Robot Handler

Make: KLA

Model: AIT UV

1 unit @ Best Price

KLA KLA-2367 300 mm system, built in 2009 and located in Woodlands, Singapore. Configured for brightfield inspection in defect detection with an inspection unit, a robot handler, and a FOUP factory interface.Specifications Manufacturer: KLA Model: KLA-2367 Vintage: 2009 Wafer Size: 300 mm Serial Number: 1333145R Location: Woodlands, Singapore Tool ID: YBFI707 Tool Status: Connected Fab Section: Defect Detection Software Version: 104507 CIM: SECS/GEM Process: Brightfield Inspection Configuration Robot Handler Inspection Unit FOUP Factory Interface Not Included SGB Board Exhaust Tubing Hose 3" Metallic G5 Host Node TCD Board 13 × G5 Nodes and RTAP

Make: KLA

Model: KLA-2367

1 unit @ Best Price

Applied Materials Verity 1 SEM 300 mm system, built in 2004 and located in Woodlands, Singapore. Configured for CD SEM measurement in metrology with a FOUP factory interface. Software version 1440b and SEC/GEM CIM interface included.Specifications Manufacturer: AMAT Model: Applied Materials Verity 1 SEM Vintage: 2004 Wafer Size: 300 mm Serial Number: U710 Location: Woodlands, Singapore Tool ID: MSEM737 (F7 MSEM705) Tool Status: Disconnected Fab Section: Metrology Software Version: 1440b CIM: SEC/GEM Process: CD SEM Measurement Configuration 3 × FOUP Factory Interface Main Frame AMAT FI Handler Not Included VACR HVPS

Make: Applied Materials

Model: Applied Materials Verity 1 SEM

1 unit @ Best Price

KLA UV1050 200 mm system, built in 2009 and located in Singapore. Configured for film thickness measurement with a robot handler and a SMIF factory interface. This metrology tool features the SUMMIT 2.40.16 software version and SECS CIM interface.Specifications Manufacturer: KLA Model: UV1050 Vintage: 2009 Wafer Size: 200 mm Serial Number: 950373UV1050 Location: Singapore Tool ID: FLMTK-04 Tool Status: Connected Fab Section: Metrology Software Version: SUMMIT 2.40.16 CIM: SECS Process: Film thickness measurement tool Configuration SMIF Factory Interface Robot Handler Main Body

Make: KLA

Model: UV1050

1 unit @ Best Price

Applied Materials Complus 4T 300 mm system, built in 2008 and located in Woodlands, Singapore. Configured for darkfield inspection in the defect detection section with a FOUP factory interface.Specifications Manufacturer: Applied Materials Model: Complus 4T Vintage: 2008 Wafer Size: 300 mm Serial Number: T2160 Location: Woodlands, Singapore Tool ID: YDFI761 Tool Status: Connected Fab Section: Defect Detection Software Version: v10.6 CIM: SECS/GEM Process: Darkfield Inspection Configuration Main Tool FOUP Factory Interface Robot Handler

Make: Applied Materials

Model: Complus 4T

1 unit @ Best Price

KLA TENCOR KLA ARCHER A10XT 200 mm system, built in 2000 and located in Singapore. Configured for overlay measurement in metrology with a robot handler and two SMIF factory interfaces.Specifications Manufacturer: KLA Tencor Model: KLA ARCHER A10XT Vintage: 2000 Wafer Size: 200 mm Serial Number: 3257 Location: Singapore Tool ID: OVLY-A06 Fab Section: Metrology CIM: SECS Process: OVERLAY MEASUREMENT Configuration Main Unit 2 × SMIF Factory Interface Robot Unit

Make: KLA Tencor

Model: KLA ARCHER A10XT

1 unit @ Best Price

Applied Materials G2 300 mm system, built in 2011 and located in Singapore. Configured for defect review with a SEMVision G2 main system, a robot handler, and two FOUP factory interfaces. Part of the metrology section.Specifications Manufacturer: Applied Materials South East Asia Pte. Ltd.W Model: G2 Vintage: 2011 Wafer Size: 300 mm Serial Number: W-242 Location: Singapore Tool ID: YSEM734 Tool Status: Connected Fab Section: Metrology Software Version: 5.4.500 CIM: SEC/GEM Process: Defect review sem Configuration SEMVision G2 Robot Handler 2 × FOUP Factory Interface Included Auxiliary Equipment Electronic Rack

Make: Applied Materials South East Asia Pte. Ltd.W

Model: G2

1 unit @ Best Price

KLA-TENCOR ASET-F5x 300 mm system, built in 2008 and located in Singapore. Configured for film thickness measurement with an ASYST S3 handler and two FOUP factory interfaces. Designed for metrology applications.Specifications Manufacturer: KLA-TENCOR Model: ASET-F5x Vintage: 2008 Wafer Size: 300 mm Serial Number: 7250630 Location: Singapore Tool ID: MFLM713 Software Version: Summit 4.9 CIM: SECs/GEM Process: Thickness Film Measurement Fab Section: Metrology Configuration 2 × FOUP Factory Interface ASYST S3 Handler

Make: KLA-Tencor

Model: ASET-F5x

1 unit @ Best Price