Other Plasma Processing Equipment and Tools
OXFORD INSTRUMENTS, OPAL, s/n: 94-220255
RF/Plasma oxide deposition tool
Tool ID: SPL2178
Other Plasma Processing Equipment and Tools
RF/Plasma oxide deposition tool
Tool ID: SPL2178
Other Plasma Processing Equipment and Tools
FRONTIER - Etch for Junctions
CHA-SiCoNi, CHB-Frontier, CHCFrontier
Tool ID: CVD21200
Other Plasma Processing Equipment and Tools
NH3 Plasmastrip
Tool ID: PSX4603
Other Plasma Processing Equipment and Tools
Well Drive Furnace
Tool ID: WDRIV-09
Other Plasma Processing Equipment and Tools
MWS 1CH KiyoFX 3CH
Tool ID: ETX2400
Other Plasma Processing Equipment and Tools
ALD TiAl / TiN
Tool ID: MDX2451
Other Plasma Processing Equipment and Tools
MC IPS
Tool ID: 93A88X
Other Plasma Processing Equipment and Tools
Dry Etch, Bx-, Cx-, E1 layers, 300mm wafers, 32nm BD/SICOH Etch
Tool ID: ETX650
Other Plasma Processing Equipment and Tools
Dry Etch
Tool ID: ETX656
Other Plasma Processing Equipment and Tools
ASM XP5 Mainframe with 2 MIR3000 process chambers
PEALD Oxide
Tool ID: RTA24501
Other Plasma Processing Equipment and Tools
ASM XP5 Mainframe with 2 MIR3000 process chambers
PEALD Oxide
Tool ID: RTA24500
Other Plasma Processing Equipment and Tools
MOCVD HfSiO
Tool ID: RTA1451