Vertical LPCVD Furnaces
Hitachi Kokusai Quixace, 300mm, s/n: T2DC6-16386
Lowk Deposition Furnace
Tool ID: FVX23902
Vertical LPCVD Furnaces
Lowk Deposition Furnace
Tool ID: FVX23902
Vertical LPCVD Furnaces
HAFNIUM_OX
Tool ID: FVX2581
Vertical LPCVD Furnaces
HAFNIUM_OX
Tool ID: FVX2580
Vertical LPCVD Furnaces
Irad Oxide
Tool ID: FVX2460
Vertical LPCVD Furnaces
Irad Oxide
Tool ID: FVX2440
Vertical LPCVD Furnaces
Vertical batch furnace that can be optimized to run various diffusion, oxidation and pressure vapor deposition processes
Tool ID: 93942X
Vertical LPCVD Furnaces
TiN ALD
Tool ID: FVX2487
Vertical LPCVD Furnaces
MT-TiN
Tool ID: FVX2488