Wafer Inspection Microscopes

KLA AIT - UV 300 mm system, built in 2004 and located in Singapore. Configured for darkfield inspection with an inspection unit, robot handler, and FOUP factory interface. Suitable for defect detection applications. Specifications Manufacturer: KLA Model: AIT - UV Vintage: 2004 Wafer Size: 300 mm Serial Number: UV1070 Location: Singapore Tool ID: YDFI704 Fab Section: Defect Detection Software Version: 6.3.24 CIM: SECS/GEM Process: Darkfield Inspection Configuration Inspection Unit Robot Handler FOUP Factory Interface Not Included Laser Power Supply 5 × Optic Parts Laser

Make: KLA

Model: AIT - UV

1 unit @ Best Price

KLA AITII 200 mm system, built in 2000 and located in Singapore. Configured for defect detection with a SMIF factory interface. Software version AIT and CIM interface SECS. Specifications Manufacturer: KLA Model: AITII Vintage: 2000 Wafer Size: 200 mm Serial Number: 3000020247 Location: Singapore Tool ID: DAIT-503 Tool Status: Connected Fab Section: Defect Detection Software Version: AIT CIM: SECS Process: DFECT Configuration Main Body Stage 2 × SMIF Factory Interface

Make: KLA

Model: AITII

1 unit @ Best Price

HSEB ODIN-A30 300 mm system, built in 2012 and located in Dresden, Germany. Configured for wafer inspection with an automated wafer handling system and two FOUP factory interfaces. Designed for defect detection applications. Specifications Manufacturer: HSEB Model: ODIN-A30 Vintage: 2012 Wafer Size: 300 mm Serial Number: 2100168 Location: Dresden, Germany Tool ID: AMI801 Tool Status: Warehouse Fab Section: Defect Detection Software Version: TC*1.15.5/10.2.00 CIM: SECS/GEM Process: Wafer Inspection Tool Configuration Meas System Automated Wafer Handling 2 × FOUP Factory Interface

Make: HSEB

Model: ODIN-A30

1 unit @ Best Price

KLA KLA2138-IS 200 mm system, built in 1999 and located in Singapore. Configured for defect detection with a SMIF factory interface. Software version KLA2138 and CIM SEC. Specifications Manufacturer: KLA Model: KLA2138-IS Vintage: 1999 Wafer Size: 200 mm Serial Number: W21XX1149 Location: Singapore Tool ID: DMON-502 Tool Status: Connected Fab Section: Defect Detection Software Version: KLA2138 CIM: SEC Process: DEFECT Configuration 2 × SMIF Factory Interface Main System

Make: KLA

Model: KLA2138-IS

1 unit @ Best Price

KLA KLA2138-IS 200 mm system, built in 2000 and located in Singapore. Configured for defect detection with a stage handler and two SMIF factory interfaces. Software version KLA2138 and CIM SEC. Specifications Manufacturer: KLA Model: KLA2138-IS Vintage: 2000 Wafer Size: 200 mm Serial Number: W21XX1220 Location: Singapore Tool ID: DMON-503 Tool Status: Connected Fab Section: Defect Detection Software Version: KLA2138 CIM: SEC Process: DFEC Configuration Stage Handler Main Body 2 × SMIF Factory Interface

Make: KLA

Model: KLA2138-IS

1 unit @ Best Price

KLA AITII 200 mm system, built in 2000 and located in Singapore. Configured for defect detection with a SMIF factory interface. Software version AIT and CIM SEC. Specifications Manufacturer: KLA Model: AITII Vintage: 2000 Wafer Size: 200 mm Serial Number: 3099110249 Location: Singapore Tool ID: DAIT-502 Fab Section: Defect Detection Software Version: AIT CIM: SEC Process: DFECT Configuration 2 × SMIF Factory Interface

Make: KLA

Model: AITII

1 unit @ Best Price

KLA KLA2138-IS 200 mm system, built in 1998 and located in Singapore. Configured for defect inspection with a stage handler and two SMIF factory interfaces. Specifications Manufacturer: KLA Model: KLA2138-IS Vintage: 1998 Wafer Size: 200 mm Serial Number: W21XX1081 Location: Singapore Tool ID: DMON-501 Tool Status: Connected Fab Section: Defect Detection Software Version: KLA2138-IS CIM: SECS Process: DEFECT INSPECTION Configuration Stage Handler 2 × SMIF Factory Interface

Make: KLA

Model: KLA2138-IS

1 unit @ Best Price

Applied Materials Complus 4T 300 mm system, built in 2004 and located in Woodlands, Singapore. Configured for darkfield inspection with a robot handler and a FOUP factory interface. Specifications Manufacturer: Applied Materials Model: Complus 4T Vintage: 2004 Wafer Size: 300 mm Serial Number: T268 Location: Woodlands, Singapore Tool ID: YDFI703 Tool Status: Connected Fab Section: Defect Detection Software Version: V10.6 CIM: SECS/GEM Process: Darkfield Inspection Configuration Robot Handler FOUP Factory Interface

Make: Applied Materials

Model: Complus 4T

1 unit @ Best Price

KLA KLA-PUMA9000 300 mm system, built in 2005 and located in Woodlands, Singapore. Configured for darkfield inspection with an inspection unit, a robot handler, and a FOUP factory interface. Suitable for defect detection applications. Specifications Manufacturer: KLA Model: KLA-PUMA9000 Vintage: 2005 Wafer Size: 300 mm Serial Number: 1042 Location: Woodlands, Singapore Tool ID: YDFI791 Tool Status: Connected Fab Section: Defect Detection Software Version: 9.5.410.2.7 CIM: SECS/GEM Process: Darkfield Inspection Configuration FOUP Factory Interface Inspection Unit Robot Handler Included Auxiliary Equipment Chiller Not Included KVM SAC Board

Make: KLA

Model: KLA-PUMA9000

1 unit @ Best Price

KLA AIT UV 300 mm system, built in 2002 and located in Woodlands, Singapore. Configured for darkfield inspection with a robot handler and a FOUP factory interface. Specifications Manufacturer: KLA Model: AIT UV Vintage: 2002 Wafer Size: 300 mm Serial Number: UV1004R Location: Woodlands, Singapore Tool ID: YDFI736 Tool Status: Connected Fab Section: Defect Detection Software Version: 6.3.24.3 CIM: SECS/GEM Process: Darkfield Inspection Configuration Inspection Unit FOUP Factory Interface Robot Handler

Make: KLA

Model: AIT UV

1 unit @ Best Price

KLA KLA-2367 300 mm system, built in 2009 and located in Woodlands, Singapore. Configured for brightfield inspection in defect detection with an inspection unit, a robot handler, and a FOUP factory interface. Specifications Manufacturer: KLA Model: KLA-2367 Vintage: 2009 Wafer Size: 300 mm Serial Number: 1333145R Location: Woodlands, Singapore Tool ID: YBFI707 Tool Status: Connected Fab Section: Defect Detection Software Version: 104507 CIM: SECS/GEM Process: Brightfield Inspection Configuration Robot Handler Inspection Unit FOUP Factory Interface Not Included SGB Board Exhaust Tubing Hose 3" Metallic G5 Host Node TCD Board 13 × G5 Nodes and RTAP

Make: KLA

Model: KLA-2367

1 unit @ Best Price

Applied Materials Complus 4T 300 mm system, built in 2008 and located in Woodlands, Singapore. Configured for darkfield inspection in the defect detection section with a FOUP factory interface. Specifications Manufacturer: Applied Materials Model: Complus 4T Vintage: 2008 Wafer Size: 300 mm Serial Number: T2160 Location: Woodlands, Singapore Tool ID: YDFI761 Tool Status: Connected Fab Section: Defect Detection Software Version: v10.6 CIM: SECS/GEM Process: Darkfield Inspection Configuration Main Tool FOUP Factory Interface Robot Handler

Make: Applied Materials

Model: Complus 4T

1 unit @ Best Price