Other Chemical Vapor Deposition Equipment
Novellus C2 Sequel (PECVD), 200mm, s/n: 99-46-C25763
Tool ID: FNVL301
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Other Chemical Vapor Deposition Equipment
TEL Tactras Vigus, 300mm, s/n: FA1272
With Vigus Ix BSP Chambers
Tool ID: ETX28512
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Other Chemical Vapor Deposition Equipment
TEL Tactras Vigus, 300mm, s/n: FA1192
TEL Tactras Vigus ATCC ILDEtch BEOL
Tool ID: ETX28505
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Other Chemical Vapor Deposition Equipment
TEL Tactras Vigus, s/n: FA2141
TEL Tactras Vigus LK3
Tool ID: ETX4520
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