Tokyo Electron Ltd (TEL) P-8 200 mm system, built in 1995 and located in Woodlands, Singapore. Configured as a fully automatic wafer prober with an open cassette factory interface and a robot handler. Designed for metrology applications as an inline tester.Specifications

• Manufacturer: Tokyo Electron Ltd (TEL)
• Model: P-8
• Vintage: 1995
• Wafer Size: 200 mm
• Serial Number: PE01811
• Location: Woodlands, Singapore
• Tool ID: PRBR-502
• Fab Section: Metrology
• Tool Status: Connected
• CIM: YES
• Process: Inline TesterConfiguration
  • Main Tool Body
  • Open Cassette Factory Interface
  • Robot Handler