
Santa Clara Plastic (SCP)/none 9415, 200 mm, 2002
Santa Clara Plastic (SCP) 9415 200 mm system, built in 2002 and located in Woodlands, Singapore. Configured for nitride etch with a wet bench, a robot handler, and two SMIF factory interfaces.Specifications Manufacturer: Santa Clara Plastic (SCP)/none Model: 9415 Vintage: 2002 Wafer Size: 200 mm Serial Number: 00036340-01 Location: Woodlands, Singapore Tool ID: NITW-202 Tool Status: Running Wafers Fab Section: Clean Software Version: Windows 2000 CIM: SEC, GEM Linked Process: Nitride etch Configuration Wet Bench ROBOT Handler 2 × SMIF Factory Interface Included Auxiliary Equipment Dryer HX 150 Chiller UPS Not Included 2 × CO2 Cylinder










