Scanning Electron Microscopes

  1. Hitachi S-9220, 200mm, s/n: 9749-10

    Scanning Electron Microscopes

    Hitachi S-9220, 200mm, s/n: 9749-10

    CD Measurement

    Tool ID: FSEM-X01

  2. Zeiss Orion NanoFab, s/n: 6015

    Scanning Electron Microscopes

    Zeiss Orion NanoFab, s/n: 6015

    Focus Ion Beam Mill

    Tool ID: PKG9120

  3. KLA-TENCOR EDR 5210, 300mm, s/n: 5040132

    Scanning Electron Microscopes

    KLA-TENCOR EDR 5210, 300mm, s/n: 5040132

    Defect Review

    Tool ID: YSEM774

  4. KLA-TENCOR EDR 5210, 300mm, s/n: 5040134

    Scanning Electron Microscopes

    KLA-TENCOR EDR 5210, 300mm, s/n: 5040134

    Defect Review

    Tool ID: YSEM773

  5. KLA-TENCOR EDR 5210, 300mm, s/n: 5040135

    Scanning Electron Microscopes

    KLA-TENCOR EDR 5210, 300mm, s/n: 5040135

    Defect Review

    Tool ID: YSEM772

  6. KLA-TENCOR EDR 5200, 300mm, s/n: 5040128

    Scanning Electron Microscopes

    KLA-TENCOR EDR 5200, 300mm, s/n: 5040128

    Defect Review

    Tool ID: YSEM771

  7. AMAT Verity1 SEM, 300mm, s/n: U-757

    Scanning Electron Microscopes

    AMAT Verity1 SEM, 300mm, s/n: U-757

    CD SEM

    Tool ID: MSEM733 (PM-CDA-01)

  8. KLA AITXUV, 300mm, s/n: UV1138

    Scanning Electron Microscopes

    KLA AITXUV, 300mm, s/n: UV1138

    Darkfield inspection

    Tool ID: YDFI731

  9. HMI ESCAN380, 300mm, s/m: FF02002

    Scanning Electron Microscopes

    HMI ESCAN380, 300mm, s/m: FF02002

    EBEAM Inspection

    Tool ID: YEBI731 (F7 YEBI703)

  10. KLA AITXUV, 300mm, s/n: UV1135

    Scanning Electron Microscopes

    KLA AITXUV, 300mm, s/n: UV1135

    Wafer scanning

    Tool ID: YDFI735

  11. KLA AITXUV, 300mm, s/n: UV1005R

    Scanning Electron Microscopes

    KLA AITXUV, 300mm, s/n: UV1005R

    Wafer scanning

    Tool ID: YDFI734

  12. KLA AITXUV, 300mm, s/n: UV1038R

    Scanning Electron Microscopes

    KLA AITXUV, 300mm, s/n: UV1038R

    Wafer scanning

    Tool ID: YDFI733