
AMAT VeritySEM, 300 mm, 2007
AMAT VeritySEM 300 mm system, built in 2007 and located in Woodlands, Singapore. Configured for CDSEM measurement with a main frame, VHP robot handler, and three FOUP factory interfaces. Suitable for metrology applications.Specifications Manufacturer: AMAT Model: VeritySEM Vintage: 2007 Wafer Size: 300 mm Serial Number: U808 Location: Woodlands, Singapore Tool ID: MSEM736 (PM-CDA-51) Tool Status: Disconnected Fab Section: Metrology Software Version: 1440b CIM: SEC/GEM Process: CDSEM Configuration Main Frame AMAT FI 3 × FOUP Factory Interface

