Critical Dimension Scanning Electron Microscopes
AMAT NanoSEM 3D, 300mm, s/n: U-666
The nanosem 3D by amat, vintage 2004, located in woodlands, singapore, is designed for advanced semiconductor inspection with a software version of 14.3.0, supporting secs/gem communication and cdsem processes.
Tool ID: MSEM762 (F7 MSEM703)