Industrial Wafer Cleaners

  1. Ebara EPO-213, 200mm, s/n: PSB90559EX

    Wafer Cleaners

    Ebara EPO-213, 200mm, s/n: PSB90559EX

    Tool ID: CMPOX-11
  2. Ebara EPO-213, 200mm, s/n: PSB80301EY

    Wafer Cleaners

    Ebara EPO-213, 200mm, s/n: PSB80301EY

    Tool ID: CMPOX-10
  3. Ebara EPO-213, 200mm, s/n: PSB60074EX

    Wafer Cleaners

    Ebara EPO-213, 200mm, s/n: PSB60074EX

    Tool ID: CMPOX-03
  4. Verteq 1800-6AL, 200mm, s/n: 24005 A

    Wafer Cleaners

    Verteq 1800-6AL, 200mm, s/n: 24005 A

    Tool ID: SRD7-01
  5. Verteq 1800-6AL, 200mm, s/n: 4314

    Wafer Cleaners

    Verteq 1800-6AL, 200mm, s/n: 4314

    Tool ID: SRD4-02
  6. Verteq 1800-6AL, 200mm, s/n: 4315

    Wafer Cleaners

    Verteq 1800-6AL, 200mm, s/n: 4315

    Tool ID: SRD4-01
  7. Verteq 1800-6AL, 200mm, s/n: 4209

    Wafer Cleaners

    Verteq 1800-6AL, 200mm, s/n: 4209

    Tool ID: SRD2-04
  8. Verteq 1800-6, 200mm, s/n: 50487E/F

    Wafer Cleaners

    Verteq 1800-6, 200mm, s/n: 50487E/F

    Tool ID: SRD2-03
  9. Verteq 1800-6AR, 200mm, s/n: 4211

    Wafer Cleaners

    Verteq 1800-6AR, 200mm, s/n: 4211

    Tool ID: SRD2-02
  10. Verteq 1800-6AR, 200mm, s/n: 4212

    Wafer Cleaners

    Verteq 1800-6AR, 200mm, s/n: 4212

    Tool ID: SRD2-01
  11. ADIXEN APR4300, 300mm, s/n: NA

    Wafer Cleaners

    ADIXEN APR4300, 300mm, s/n: NA

    WAFER DECONTAMINATION

    Tool ID: APR2202

  12. ADIXEN APR4300, 300mm, s/n: NA

    Wafer Cleaners

    ADIXEN APR4300, 300mm, s/n: NA

    WAFER DECONTANIMATION

    Tool ID: APR2201