Industrial Wafer Cleaners

  1. Ebara EPO-213, 200mm, s/n: PSB90559EX

    Wafer Cleaners

    Ebara EPO-213, 200mm, s/n: PSB90559EX

    ROLL CLEAN

    Tool ID: CMPOX-11

  2. Ebara EPO-213, 200mm, s/n: PSB80301EY

    Wafer Cleaners

    Ebara EPO-213, 200mm, s/n: PSB80301EY

    ROLL CLEAN

    Tool ID: CMPOX-10

  3. Ebara EPO-213, 200mm, s/n: PSB60074EX

    Wafer Cleaners

    Ebara EPO-213, 200mm, s/n: PSB60074EX

    ROLL CLEAN

    Tool ID: CMPOX-03

  4. Verteq 1800-6AL, 200mm, s/n: 24005 A

    Wafer Cleaners

    Verteq 1800-6AL, 200mm, s/n: 24005 A

    SRD RINSE DRY

    Tool ID: SRD7-01

  5. Verteq 1800-6AL, 200mm, s/n: 4314

    Wafer Cleaners

    Verteq 1800-6AL, 200mm, s/n: 4314

    SRD RINSE DRY

    Tool ID: SRD4-02

  6. Verteq 1800-6AL, 200mm, s/n: 4315

    Wafer Cleaners

    Verteq 1800-6AL, 200mm, s/n: 4315

    SRD RINSE DRY

    Tool ID: SRD4-01

  7. Verteq 1800-6AL, 200mm, s/n: 4209

    Wafer Cleaners

    Verteq 1800-6AL, 200mm, s/n: 4209

    SRD RINSE DRY

    Tool ID: SRD2-04

  8. Verteq 1800-6, 200mm, s/n: 50487E/F

    Wafer Cleaners

    Verteq 1800-6, 200mm, s/n: 50487E/F

    SRD RINSE DRY

    Tool ID: SRD2-03

  9. Verteq 1800-6AR, 200mm, s/n: 4211

    Wafer Cleaners

    Verteq 1800-6AR, 200mm, s/n: 4211

    SRD RINSE DRY

    Tool ID: SRD2-02

  10. Verteq 1800-6AR, 200mm, s/n: 4212

    Wafer Cleaners

    Verteq 1800-6AR, 200mm, s/n: 4212

    SRD RINSE DRY

    Tool ID: SRD2-01

  11. ADIXEN APR4300, 300mm, s/n: NA

    Wafer Cleaners

    ADIXEN APR4300, 300mm, s/n: NA

    WAFER DECONTAMINATION

    Tool ID: APR2202

  12. ADIXEN APR4300, 300mm, s/n: NA

    Wafer Cleaners

    ADIXEN APR4300, 300mm, s/n: NA

    WAFER DECONTANIMATION

    Tool ID: APR2201