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Your search for Manufacturer: KLA-Tencor
found:
  • 25 individual listing(s) with a matching description:
 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes Location
Make Model
  $  
180206

KLA-Tencor  

AIT XUV 

List all items of this typeInterferometers

in Metrology Equipment

1 Inquire Taichung, Taichung City, Taiwan
KLA Tencor AIT XUV Laser Scanning Wafer Inspection 300mm:
KLA Tencor AIT XUV Laser Scanning Wafer Inspection 300mm

185268

KLA-Tencor  

UV 1050 

List all items of this typeInterferometers

in Metrology Equipment

1 Inquire Singapore, Singapore
KLA Tencor UV 1050, 200mm, Thin Film Thickness Measurement:

KLA Tencor UV 1050, 200mm, Thin Film Thickness Measurement
TOOL ID: FLMTK-03

!!!MULTIPLE UNITS AVAILALBE!!! PLEASE INQUIRE


Tool is in warehouse in Vapor Barrier Bag on Skids.

195493

KLA-Tencor  

SCD 

List all items of this typeInterferometers

in Metrology Equipment

1 Inquire Malta, New York, United States
KLA-Tencor, SCD, 300mm:
KLA-Tencor, SCD, 300mm
195494

KLA-Tencor  

SCD 

List all items of this typeInterferometers

in Metrology Equipment

1 Inquire Malta, New York, United States
KLA-Tencor, SCD, 300mm:
KLA-Tencor, SCD, 300mm

In the fab.

S/N: 36110810064


198216

KLA-Tencor  

Optiprobe 2600 

List all items of this typeInterferometers

in Metrology Equipment

1 Inquire Singapore, Singapore
KLA-Tencor, Metrology, Optiprobe 2600, 200mm:

KLA-Tencor, Metrology, Optiprobe 2600, 200mm

S/N: 6085

1994 Vintage

178314

KLA-Tencor  

2132 

List all items of this typeOptical Inspection - Other

in Microscopes, Optical Inspection

1 Inquire Singapore, Singapore
KLA-Tencor, Bright Field Inspection, 200mm:
Manufactured in 1995; Status: Bagged and Skidded
178315

KLA-Tencor  

2132 

List all items of this typeOptical Inspection - Other

in Microscopes, Optical Inspection

1 Inquire Singapore, Singapore
KLA-Tencor, 2132 Bright Field Inspection, 200mm:
Manufactured in 1996; Status: Bagged and Skidded
178321

KLA-Tencor  

Wafersight 

List all items of this typeOptical Inspection - Other

in Microscopes, Optical Inspection

1 Inquire F* Taichung, Taichung City, Taiwan
KLA-Tencor, Wafersight , 300mm:
Manufactured in 2006; Status: Bagged and Skidded
195363

KLA-Tencor  

SL515 

List all items of this typeOptical Inspection - Other

in Microscopes, Optical Inspection

1 Inquire F* Taichung, Taichung City, Taiwan
KLA-Tencor, SL515, StarLight 515, Mask Inspection, 300mm:
KLA-Tencor, SL515, StarLight 515, Mask Inspection, 300mm

S/N : 5036

Known  Parts Missing:

qty. 1 FRU,MODULE BEAM STAB,5XX
qty. 1 FRU,MODULE DIFFUSER,5XX


189678

KLA-Tencor  

AIT Surfscan 

List all items of this typeParticle Counters

in Metrology Equipment

1 Inquire Singapore, Singapore
KLA-TENCOR, AIT 1, Surfscan, Darkfield Defect Inspection, 200mm:
KLA-TENCOR, AIT 1, Surfscan, Darkfield Defect Inspection, 200mm


189683

KLA-Tencor  

CRS1010 Review Station 

List all items of this typeParticle Counters

in Metrology Equipment

1 Inquire Singapore, Singapore
KLA- Tencor, Review Station, CRS1010, 200mm:
KLA- Tencor, Review Station, CRS1010, 200mm
192746

KLA-Tencor  

SP3 

List all items of this typeParticle Counters

in Metrology Equipment

1 Inquire East Fishkill, New York, United States
KLA-Tencor, SP3, 300mm, Particle Counter:
KLA-Tencor, SP3, 300mm, Particle Counter

Surfscan SP3 Wafer Surface Inspection System

Optimized sensitivity and throughput - < 28nm defect sensitivity on polished bare silicon

Enables qualification of current and next-generation substrates, PW, EPI, Films, SOI, strained SOI and strained Si

Qualification and monitoring of process tools, at the 32nm and below technology nodes

Assists in IC process troubleshooting and development

Features all sensitivity modes enabled, including:

Standard Throughput Inspection Mode

High Throughput Inspection Mode

High Sensitivity Inspection Mode

Advanced Illumination Optics supporting the following mode(s):

Normal Illumination

Oblique Illumination

Inspection Station configured for 300mm Vacuum Handling

Equipped with Cool White Panels

Includes 300mm Phoenix Tri FIMS Vacuum Wafer Handler (CW)

Laser Power Modulator

GEM/SECS and HSMS

E84 Enablement for AMHS, TFIMS

Three OHT Hokuyo PI/O Infrared Communication (Hardware) Devices

SP3 Options

Advanced SURFmonitor Analysis Capabilities

Brightfield (DIC) Option

XFS Lens - Tungsten (W)

XFS Lens - Copper (Cu)

XFS Lens – Poly

195489

KLA-Tencor  

HRP  

List all items of this typeParticle Counters

in Metrology Equipment

1 Inquire Malta, New York, United States
KLA-Tencor, HRP-350, 300mm:
KLA-Tencor, HRP-350, 300mm

S/N : 7020358

DOM : 8/2011

System still in the Clean Room.

MODEL,HRP-350

P-350 Profiler

Long range linearly-encoded sample stage for scans up to 300mm Integrated vibration isolation system

 

* MaxDamp isolators: Enhanced vertical/lateral vibration isolation and f aster settling time

* Precision Leveling System (PLS): Digital controller with non-contact X , Y, and Z sensors

for accurate positioning of the isolation system

* Acoustic insulation to absorb external acoustic energies Vibration dampeninP-350 measurement head: * Low noise probe sensor assembly material to absorb external and internal vibrational energies

* Stiffer head structure to minimize lateral and vertical deflection

* Standard range, 131um UltraLite sensor

Voltage configuration: 200-250V 2um radius, 60 deg. cone angle stylus

* PC with 2.8 GHz P4 processor

* P-250/350 SR (131um) Measurement Head

* -250/P-350 with SR, 131um Sensor, Standard Range, 131um Ultra Lite sensor

* Total Dynamic Range: 0-131um

* Max Step Height: 100um

Dual FIMS, Phoenix TDK LP

300mm FIMS wafer handler

TDK loadports (QTY : 2)

* Compatible with 25 wafer FIMS FOUPs

* Integrated mini-environment with HEPA filtration * Loadport door mounted mapper

* Low contact pre-aligner

* 2-inch particle monitoring hole

* Remote UI (Secondary UI

* Second user interface located on the loadport side of the 350 profiler

* Bulkhead or bay/chase configuration

Ion Shower, Phoenix Dual FIMS

De-ionizers in the handler chamber

Mini Environment

Low Contact Chuck

Low backside contact chuck * Reduces backside particles and metallic contamination

300mm Stress w/ Stress Chuck

Profiler scans to measure changes in wafer shape due to film stress * Includes 3-point wafer chuck, compatible with automatic wafer loading

Signal Tower (RYGBW), 2 Audio

GEM/SECS and RS232

HSMS -High Speed Messaging System

E87 Carrier Management Services (Based on E39)

E40 Process Job Management, E94 Control Job Management and E90 Substrate Tracking

Two AdvanTag Radio Frequency (RF) Carrier ID Readers

300mm Tester Seismic Clamps

UltraSharp: 20nm, 20 deg

DuraSharp II: 40nm/40° Cert.

E84 Error Recovery

MMI Loadport

HEAD ASSY,HRP350CMP

AMC Filter Adaptor DFIMS Handler

AMC Filter Adaptor Inspection Module

195490

KLA-Tencor  

HRP 

List all items of this typeParticle Counters

in Metrology Equipment

1 Inquire Malta, New York, United States
KLA-Tencor, HRP-350, 300mm:

KLA-Tencor, HRP-350, 300mm

S/N : 7020359

DOM : 8/2011

Still in the Clean Room

199509

KLA-Tencor  

2351 

List all items of this typeParticle Counters

in Metrology Equipment

1 Inquire East Fishkill, New York, United States
KLA - Tencor, KLA-2351, Bright Field Defect Detection System, 300mm:
KLA - Tencor, KLA-2351, Bright Field Defect Detection System, 300mm
199683

KLA-Tencor  

SP1-DLS 

List all items of this typeParticle Counters

in Metrology Equipment

1 Inquire Dresden, Saxony, Germany
KLA-Tencor, SP1, DLS, 300mm:

KLA-Tencor, SP1, DLS, 300mm

S/N: 1204-0266

199684

KLA-Tencor  

SP1 - DLS 

List all items of this typeParticle Counters

in Metrology Equipment

1 Inquire Dresden, Saxony, Germany
KLA-Tencor, SP1, DLS, 300mm:

KLA-Tencor, SP1, DLS, 300mm
S/N: 1204-0253

178304

KLA-Tencor  

ES31 

List all items of this typeScanning Electron Microscopes

in Microscopes, Optical Inspection

1 Inquire F* Singapore, Singapore
178305

KLA-Tencor  

ES32 

List all items of this typeScanning Electron Microscopes

in Microscopes, Optical Inspection

1 Inquire Taichung, Taichung City, Taiwan
KLA-Tencor, ES32, E-beam Inspection, 300mm:
Manufactured in 2007; Status: Bagged and Skidded


!!! MULTIPLE UNITS AVAILABLE!!! Please inquire
188890

KLA-Tencor  

eS810 

List all items of this typeScanning Electron Microscopes

in Microscopes, Optical Inspection

1 Inquire East Fishkill, New York, United States
KLA-TENCOR, eS810, e-beam inspection, 300mm:
KLA-TENCOR, eS810, e-beam inspection, 300mm
188891

KLA-Tencor  

eS810 

List all items of this typeScanning Electron Microscopes

in Microscopes, Optical Inspection

1 Inquire F* East Fishkill, NY, United States
KLA-TENCOR, eS810, e-beam inspection, 300mm:
KLA-TENCOR, eS810, e-beam inspection, 300mm

S/N: 5158014


Voltage Contrast and Large Physical Defect Inspection, Electron Beam Inspection (EBI).  Most updated KLA Tencor EBI tool available including Super Wide Optics.  Two 300mm FOUP load ports.  Vendor maintained throughout.  

199714

KLA-Tencor  

HRP-340 

List all items of this typeScientific and Laboratory Equipment - Other

in Metrology Equipment

1 Inquire N* Dresden, Saxony, Germany
KLA-Tencor, HRP-340, 300mm, Profilometer:
KLA-Tencor, HRP-340, 300mm, Profilometer


199716

KLA-Tencor  

HRP-340 

List all items of this typeScientific and Laboratory Equipment - Other

in Metrology Equipment

1 Inquire N* Dresden, Saxony, Germany
KLA-Tencor, HRP-340, 300mm, Profilometer:

KLA-Tencor, HRP-340, 300mm, Profilometer
In Production

199717

KLA-Tencor  

HRP-340 

List all items of this typeScientific and Laboratory Equipment - Other

in Metrology Equipment

1 Inquire N* Dresden, Saxony, Germany
KLA-Tencor, HRP-340, 300mm, Profilometer:

KLA-Tencor, HRP-340, 300mm, Profilometer
NOTE:
FEC PC or robot controller not working


178326

KLA-Tencor  

CRS1010 

List all items of this typeWafer Inspection Microscopes

in Microscopes, Optical Inspection

1 Inquire F* Singapore, Singapore
KLA-Tencor, CRS1010 Defect Review, 200mm:
Manufactured in 1997; Status: Bagged and Skidded

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.