 |
Item ID |
Short Description |
Product Type / Details |
#
|
Price |
Notes |
Location |
| Make |
Model |
| |
|
$ |
|
 |
199718
|
ASML |
PAS5500 /1100 |
in Wafer Fabrication Equipment
|
1
|
|
Inquire |
 N* |
Burlington, Vermont, United States |
|
ASML PAS 5500/1100, 200mm, 193nm, Scanner:ASML 193nm 5500/1100 Scanner
|
|
196827
|
ASML |
AT 850 |
in Microscopes, Optical Inspection
|
1
|
|
Inquire |
|
East Fishkill, New York, United States |
|
ASML AT-850, 300mm, KrF 248nm Scanner: ASML AT-850D, 300mm, KrF 248nm Scanner, S/N : m5946 Known Tool Issues:
Currently power off with Lens gas flowing, tool had issue with illumination rack that will require replacement. The tool currently has all of the parts present, but they have not necessarily been calibrated or setup with the tool being off. Laser has 104.5 Billion pulses on it. Components were good when shutdown.
The Beam steering hardware in not functional, and the ACC needs an heat exchanger installed Tool ID: GB03
|
|
197858
|
ASML |
TWINSCAN XT:850F |
in Microscopes, Optical Inspection
|
1
|
|
Inquire |
|
Veldhoven, North Brabant, Netherlands |
|
ASML, XT: 850F, 300mm, KrF, :ASML, TWINSCAN XT:850F, 300mm, KrF, S/N: m7691 Laser model CYMER ELS-7610K (40W)
MES machine type XT850F
OIU/Reticle-/Waf.aux.port Right Configuration
Power 400 Volt
In warehouse stored.
|
|
|
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