Other Plasma Processing Equipment and Tools
OXFORD INSTRUMENTS, OPAL, s/n: 94-220255
RF/Plasma oxide deposition tool
Tool ID: SPL2178
Mixed Lots Of Plasma Processing Equipment
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Other Plasma Processing Equipment and Tools
AXCELIS INT340, 300mm, s/n: INT340029
NH3 Plasmastrip
Tool ID: PSX4603
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Other Plasma Processing Equipment and Tools
TEL Alpha-8S, 200mm, s/n: A00009835234
Well Drive Furnace
Tool ID: WDRIV-09
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Other Plasma Processing Equipment and Tools
LAM 2300 E4, 300mm, s/n: 1017439-11-32-0313
MWS 1CH KiyoFX 3CH
Tool ID: ETX2400
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Other Plasma Processing Equipment and Tools
AMAT CENTURA ENABLER, 300mm, s/n: 407472
Dry Etch, Bx-, Cx-, E1 layers, 300mm wafers, 32nm BD/SICOH Etch
Tool ID: ETX650
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Other Plasma Processing Equipment and Tools
AMAT Centura AP Enabler, 300mm, s/n: 412351
Dry Etch
Tool ID: ETX656
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Other Plasma Processing Equipment and Tools
ASM MIR3000, 300mm, s/n: 2100-141790
ASM XP5 Mainframe with 2 MIR3000 process chambers
PEALD Oxide
Tool ID: RTA24501
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Other Plasma Processing Equipment and Tools
ASM MIR3000, 300mm, s/n: 2100-131190
ASM XP5 Mainframe with 2 MIR3000 process chambers
PEALD Oxide
Tool ID: RTA24500
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Other Plasma Processing Equipment and Tools
TEL Trias, 300mm, s/n: C14493
MOCVD HfSiO
Tool ID: RTA1451
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Other Plasma Processing Equipment and Tools
TEL Trias, 300mm, s/n: C12403
MOCVD HfSiO
Tool ID: RTA450
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Other Plasma Processing Equipment and Tools
LAM SOLA, 300mm, s/n: VXL-2673
LAM VEXL SOLA MOD.
Tool ID: UVC25106
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Other Plasma Processing Equipment and Tools
TEL Certas Wing, 300mm, s/n: WJ0039
TEL Certas Wing used for gas etch
Tool ID: DCL21006
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