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Your search for Manufacturer: ASM
found:
  • 15 Listing(s) with a matching description:
 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
201749
ASM  

ASM  

E3200 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

1 Inquire Dresden, Saxony, Germany
ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System:

ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System

E3200 RP left hand

S/N : 34060

 

In the fab.  Cold idle.

201750
ASM  

ASM  

E3200 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

1 Inquire Dresden, Saxony, Germany
ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System E3200 RP:

ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System

S/N : 034100


 

In the Fab.  Cold idle.

199718
ASML  

ASML  

PAS5500 /1100 

List all items of this typeDeep UV Wafer Stepper

in Wafer Fabrication Equipment

1 Inquire Burlington, Vermont, United States
ASML PAS 5500/1100, 200mm, 193nm, Scanner:



ASML 193nm 5500/1100 Scanner
201146
ASML  

ASML  

PAS5500 /100D 

List all items of this typeI-Line Wafer Stepper

in Wafer Fabrication Equipment

1 Inquire Singapore, Singapore
ASML PAS 5500 - /100D, iLine Stepper, 200mm:
ASML PAS 5500 - /100D, iLine Stepper, 200mm

onLine

S/N : 8846
201147
ASML  

ASML  

PAS5500 /100D 

List all items of this typeI-Line Wafer Stepper

in Wafer Fabrication Equipment

1 Inquire Singapore, Singapore
ASML PAS 5500/1100, 200mm, 193nm, Scanner:
ASML PAS 5500/1100, 200mm, 193nm, Scanner

S/N : 8217  NOTE: Serial Number on the Configuration is incorrect. 


Deinstalled Dec 2016 

201148
ASML  

ASML  

PAS5500 /100D 

List all items of this typeI-Line Wafer Stepper

in Wafer Fabrication Equipment

1 Inquire Singapore, Singapore
ASML PAS 5500 - /100D, iLine Stepper, 200mm:
ASML PAS 5500 - /100D, iLine Stepper, 200mm

S/N : 8550

OnLine in the Fab
196827
ASML  

ASML  

AT 850 

List all items of this typeOptical Inspection - Other

in Microscopes, Optical Inspection

1 Inquire East Fishkill, New York, United States
ASML AT-850, 300mm, KrF 248nm Scanner:

 

ASML AT-850D, 300mm, KrF 248nm Scanner, 

S/N : m5946

Known Tool Issues:
Currently power off with Lens gas flowing, tool had issue with illumination rack that will require replacement.  The tool currently has all of the parts present, but they have not necessarily been calibrated or setup with the tool being off.  Laser has 104.5 Billion pulses on it.  Components were good when shutdown.
The Beam steering hardware in not functional, and the ACC needs an heat exchanger installed

 

Tool ID: GB03

202506
ASM  

ASM  

P8300 Polygon 

List all items of this typeSingle Chamber RTP Tools

in Wafer Fabrication Equipment

1 Inquire Dresden, Saxony, Germany
ASM, Polygon, P8300, 300mm Multi Chamber Platform, Platform Only:

ASM, Polygon, P8300, 300mm Multi Chamber Platform, Platform Only

 

S/N : 1E-834500-01

 

DOM : August 2010

183169
ASM  

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Malta, New York, United States
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2541

Serial Number: 2E0082

2011 Vintage
183170
ASM  

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Malta, New York, United States
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2540

Serial Number : 2E0066

2011 Vintage

 

Tool ID: FVX2540

 
183417
ASM  

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Malta, New York, United States
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN:
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2560

Serial Number: 2E0061-00-01

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2560

183418
ASM  

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Malta, New York, United States
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN:
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2561

Serial Number: 2E0071-00-01


Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2561

196930
ASM  

ASM  

A300 VT 

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Burlington, Vermont, United States
ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation

Cold shutdown

Vintage 1997

S/N: 71F5669AE
196931
ASM  

ASM  

A300 VT 

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Burlington, Vermont, United States
ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation



S/N: 71F5669AC







196932
ASM  

ASM  

A300 VT 

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Burlington, Vermont, United States
ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation


Cold, Shutdown

S/N: 71F5669AE


NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.