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Your search for Manufacturer: ASM
found:
  • 14 individual listing(s) with a matching description:
 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes Location
Make Model
  $  
195174

ASM  

E3200  

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

1 Inquire Dresden, Saxony, Germany
ASM, E3200, 300mm, Epi Deposition System:
ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System
Epsilon 3200, Epitaxial Reactor

In the fab.

• Gas Loops:
– Nitrogen (N2) purge
– Hydrogen (H2) carrier and purge
– Hydrogen chloride (HCl) wafer and chamber etch
– Primary silicon source, dichlorosilane (SiH2Cl2, gas)
– Low flow hydrogen chloride (HCl)
– Auxiliary silicon source, silane (SiH4)
– Germanium source, germane (GeH4)
• Advanced application valving (for multilayer sharp-transition processing)

195647

ASM  

Epsilon 3200 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

1 Inquire Dresden, Saxony, Germany
ASM, E3200, 300mm, Epi Deposition System:

ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System

Epsilon 3200, Epitaxial Reactor

In the fab.

• Gas Loops:
– Nitrogen (N2) purge
– Hydrogen (H2) carrier and purge
– Hydrogen chloride (HCl) wafer and chamber etch
– Primary silicon source, dichlorosilane (SiH2Cl2, gas)
– Low flow hydrogen chloride (HCl)
– Auxiliary silicon source, silane (SiH4)
– Germanium source, germane (GeH4)
• Advanced application valving (for multilayer sharp-transition processing)

199194

ASM  

E3200 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

1 Inquire Dresden, Saxony, Germany
ASM, E3200, 300mm, Epi Deposition System:

ASM, E3200, 300mm, Epi Deposition System

Left Handed Reduced Pressure

FRONT END INTERFACE
Load Ports (Qty. 2) ISOPORT
FOUP ID Reader (RF), Qty. 2
Side Louvered Panels/Flat Top (Ballroom Configuration)
Light Tower - 4 position (STD)
Installation (2 per system):
Door Mounted on Wafer Transfer Module (Std)
FEI Mount (for Ballroom configuration)
Dual 25 wafer Loadlock

Vacuum Load Locks
Level 2
(VLL configured for two pumps: one dedicated
to LL#1 and LL #2 and one for WHC)
REACTOR MODULE
HCI Detector- Reactor
TEK

Gases (Unit/Clerity 8161 digital0
N2
H2 - 100slm
HCl - 30slm
B2H6 - 20/200/200
As3/Ph3 - 20/200/200
DCS - 500sccm
SiH4 - 500sccm
GeH4 - 200sccm

Bottom Services





199195

ASM  

E3200  

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

1 Inquire Dresden, Saxony, Germany
ASM, E3200, 300mm, Epi Deposition System:

ASM, E3200, 300mm, Epi Deposition System

Warm Idle
S/N: 034040

Right Handed System


199718

ASML  

PAS5500 /1100 

List all items of this typeDeep UV Wafer Stepper

in Wafer Fabrication Equipment

1 Inquire N* Burlington, Vermont, United States
ASML PAS 5500/1100, 200mm, 193nm, Scanner:



ASML 193nm 5500/1100 Scanner
196827

ASML  

AT 850 

List all items of this typeOptical Inspection - Other

in Microscopes, Optical Inspection

1 Inquire East Fishkill, New York, United States
ASML AT-850, 300mm, KrF 248nm Scanner:

 

ASML AT-850D, 300mm, KrF 248nm Scanner, 

S/N : m5946

Known Tool Issues:
Currently power off with Lens gas flowing, tool had issue with illumination rack that will require replacement.  The tool currently has all of the parts present, but they have not necessarily been calibrated or setup with the tool being off.  Laser has 104.5 Billion pulses on it.  Components were good when shutdown.
The Beam steering hardware in not functional, and the ACC needs an heat exchanger installed

 

Tool ID: GB03

197858

ASML  

TWINSCAN XT:850F 

List all items of this typeOptical Inspection - Other

in Microscopes, Optical Inspection

1 Inquire Veldhoven, North Brabant, Netherlands
ASML, XT: 850F, 300mm, KrF, :
ASML, TWINSCAN XT:850F, 300mm, KrF, 

S/N: m7691

Laser model CYMER ELS-7610K (40W)
MES machine type XT850F
OIU/Reticle-/Waf.aux.port Right Configuration
Power 400 Volt

In warehouse stored.

183169

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Malta, NY, United States
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2541

2011 Vintage
183170

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Malta, New York, United States
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2540

2011 Vintage

 

Tool ID: FVX2541

 
183417

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Malta, New York, United States
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN:
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2560

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2560

183418

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Malta, New York, United States
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN:
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2561

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2561

196930

ASM  

A300 VT 

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Burlington, Vermont, United States
ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation

Cold shutdown

Vintage 1997

S/N: 71F5669AE
196931

ASM  

A300 VT 

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Burlington, Vermont, United States
ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation



S/N: 71F5669AC







196932

ASM  

A300 VT 

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Burlington, Vermont, United States
ASM Advance 300 VT, Vertical Furnace, 200mm, Oxidation:
ASM Advance 300 VT,  Vertical Furnace, 200mm, Oxidation


Cold, Shutdown

S/N: 71F5669AE


NOTE:
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   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.