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FULL DESCRIPTION of Item 234539

in Deep UV Wafer Stepper
Item ID: 234539

Offered 1 Offered Inquire


Nikon, S204B, 200mm, S/N 6030134

Nikon, S204B, 200mm, S/N 6030134

67X92V Lens Data:

Distortion =  0.015 µm

IU Flare = 1.80%

Lens Flare = 9.0%

Uniformity = 5.3%

Power = 779 mW

Total Focus Deviation = 0.202 µm 

Astigmatism = 0.081 µm 

Coma = 0.062 µm

Iso DOF = N/A µm (>35nm of CD Range at Best Focus)

Tool ID: 67X92V

 Nikon, S204B, 200mm, S/N 6030134

Location: Burlington, Vermont, United States
Unit Price Inquire
Number of Units 1
Manufacturer Nikon
Model S204B
Extended Description  Details at X92V.pdf
Year of Manufacture 2000

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