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FULL DESCRIPTION of Item 209947

in Other Chemical Vapor Deposition Equipment
Item ID: 209947

Offered 1 Offered Inquire


ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System E3200 RP

ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System E3200 RP

Installed.  Idle.

GAS PANEL NOTES :

- All gas module components ( MFCs etc. ) are installed.
- The only change is :  GeH4  MFC size is 200 sccm
 
- EPI104 was  used  only  for SiGe-Process.
- No dopant gases were hooked up.
 

Tool ID: EPI104

ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System E3200 RP
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Location: Dresden, Saxony, Germany
Unit Price Inquire
Number of Units 1
Manufacturer ASM
Model E3200 RP
Description Single Chamber EPI deposition system
Extended Description  Details at EPI104.pdf

Shipping & Handling:

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Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
GLOBALFOUNDRIES is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
 
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