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in Other Plasma Processing Equipment and Tools
Item ID: 202909

Offered 1 Offered Inquire

TEL, Tactras Vigas LK3, 300mm, Oxide Etch

TEL, Tactras Vigas LK3, 300mm, Oxide Etch

 S/N : F2141

New in Box with Original packing.

Tactras Platform with two Vigus LK3 Chambers:

Loader Module 2.0
3x Nitrogen Purged Loadports (PLP)
Advanced Purge Station (PST)
Interface-A (Freeze1) and Ingenio Software
included VTM/LLM pump
Carrier ID reader for LP
2x Vigus LK3 chambers
2 x ATCC MP (120deg)
16 total Gas Lines
Q-ALE kit
Syncronized Pulse
FC2 chamber hardware
Large Turbo Pump (non-heated)
C5K Endpoint Detection System
Fast Flow Measurement System (FFMS)
S2-93 Safety is included
CE Marking
Chillers are not included


Tool ID: ETX4520

TEL, Tactras Vigas LK3, 300mm, Oxide Etch
  Click to see additional image(s)... other image

Location: Dresden, Saxony, Germany
Unit Price Inquire
Number of Units 1
Manufacturer Tel
Model Tactras Vigas LK3
Extended Description  Details at ETX4520.pdf
click to view document at right in new windowgas panel 1

Shipping & Handling:

All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
GLOBALFOUNDRIES is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.

All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.