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FULL DESCRIPTION of Item 201546

in Other Chemical Vapor Deposition Equipment
Item ID: 201546

Offered 1 Offered Inquire


Producer GT, AMAT, 300mm, CVD, Cobalt Chamber Only

Producer GT, AMAT, 300mm, CVD, Cobalt Chamber  Only 

In the fab, Idle

S/N : 428357-DG-ACHA

 

MISSING PARTS

UPS batteries or battery packQty  / Units
missing door interlock magnet mounting nuts2
Needs GUI software work. Comes up only in safe mode. Does not follow commands1
Needs LCF1
Missing chamber A/C box cover1
Missing S1 S2 chamber wafer heater1
Missing S1 S2 heater lift mechanism1
Missing S1 S2 heater lift driver, lead screw, motor1
Several cables not connected1
top plate LL1
liner LL1
Gas distribution plate APC1
Bucket LL1
Edge ring large1
Edge ring small1
lock nut quartz tube1
tube liner AX7670 APC 300 mm Quartz tube1
STP-iXR1606 Turbo pump shutting off after few seconds . Turbo having hw problems1
Dump DI water from S1 and S2 DI water container1
S1 H2O MFC 20 sccm1
Missing DI water container cover1
RPS disconnected1
S1 lift controller not attached1
Needs LCF and Chamber D handoffs1
ChD side1 lift not mounted, harness has pulled wires1
Needs new indexer connector for side 11
FI lower LL door will not shut when commanded1
ChD water ampoules installed but nothing connected/plugged in1
ChD RPS units power not connected1

Needs LCF and  chambers handoffs for all chambers

 

1

Tool ID: CVD2931U1

Producer GT, AMAT, 300mm, CVD, Cobalt Chamber Only

Location: Malta, New York, United States
Unit Price Inquire
Number of Units 1
Manufacturer Applied Materials
Model Producer GT Chamber
Description CVD, Cobalt Chamber
Extended Description  Details at CVD2931U1.pdf

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