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Bruker, D8FABLINE, 300mm, X-Ray Metrology
Bruker, D8FABLINE, 300mm, X-Ray Metrology
S/N 204500
2009
The tool is an automated High resolution X-ray diffractometer, clean room (class 1 US-FED-STD 209 or Class 2 ISO 14644-1) compatible, with full 300 mm wafer mapping capabilities. The D8 FABLINE consists of two stainless steal cabinets attached to each other. The first one is an X-ray analytical module composed of: radiation safe enclosure, vertical D8 goniometer, UMC 300mm wafer stage and dedicated optical set-ups, and all required supplies. The second is a handling module Equipment Front End Module (EFEM) Bridge tool Startan from Asyst.The wafers are carried either in FOUP (Front Opening Unified Pod) for 300mm or in FOUP [INVALID] for 200mm..
Tool ID: KZD1
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