Q: What size is the lamphouse? A: type ZE1000G/175944 1500W
Q: What is the lamp intensity (mW) for this machine? A: We typically used 30 mW/sq cm at the wafer. The machine could provide more intensity with a new lamp.
Q: What filter is available? A: We used G, H and I line together. Other filters are possible and available from Suss.
Q: What is the model of power supply does it have? A: CIC1200/157308L
Q: Is the software using Window base? A: Yes
Q: What model microscope is on the tool? A: DVM 8 Dual video Microscope
Q: What is the current status and condition? Any known problems? A: Working condition, no issues
Q: Does it have BSA – backside alignment? A: No BSA
Q: Is it able to run 6in and 8in? Does it have mask plate for both 6in and 8in? A: Tool is set up for 10" masks and 8" wafers. At Suss it was tested with 9" masks, possible with another mask holder. The tool can be setup for 6" wafers but we have no experience with this. Never ran 6" wafers.
Q: What is the microscope magnification? A: Please confirm at inspection.
Q: Is there chiller given together with the machine? A: No